Excimer lamp apparatus

A technology of excimer lamp and suspension body, which is applied to lighting devices, lighting auxiliary devices, components of lighting devices, etc.

Active Publication Date: 2013-05-01
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This amount of decrease, that is, the amount of expansion, depends on the lamp output of the excimer lamp 102 or the cycle of turning on and off the lamp, etc., and changes with temperature. It is designed to avoid contact with the substrate 110, but when changing the lighting output or lighting method of the excimer lamp device 100, the droop amount cannot be designed according to the shape of the lamp support 103a.

Method used

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Examples

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Embodiment Construction

[0032] use figure 1 The first embodiment of the present invention will be described.

[0033] figure 1 It is a figure showing the structure of the excimer lamp device 1 concerning the invention of this embodiment, figure 1 (a) is a front sectional view showing the structure of the excimer lamp device 1, figure 1 (b) is a side sectional view of the excimer lamp device 1 .

[0034]As shown in these figures, the housing 2 is composed of a fixed plate 21 placed on the fixed table 3 , side plates 22 disposed between the fixed plates 21 , and a shielding plate 23 for shielding the upper surfaces of the fixed plate 21 and the side plates 22 . . The suspension body 4 is fixed between the fixing plates 21 in the housing 2 , and the lamp support body 6 is supported by the suspension body 4 at approximately the center of the housing 2 . The lamp support body 6 is constituted by a support column 61 whose one end side is supported by the suspension body 4 and whose other end side ...

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Abstract

An excimer lamp apparatus is provided. The position of the lamp support arranged on a longer frame is fixed so as to avoid the friction with the processed objects, eliminate position change thereof resulted from the thermal distortion of a partition wall, and prevent the corrosion to the device loaded in the frame from the ozone generated around the excimer lamp. The excimer lamp apparatus (1) comprises a frame (1), a suspended frame (4) supported by the frame, a lamp support (6) supported by the suspended frame, an excimer lamp (5) supported by the lamp support, a partition wall (7) between the excimer lamp and suspended frame, a through hole (8) arranged on the partition wall to be used for loosely embedding the lamp support therein which is supported by the suspended frame, an adjusting mechanism for adjusting the upper and lower positions of the lamp support opposite to the suspended frame, a shielding mechanism for preventing gas from passing through the space between the throughhole and the lamp support loosely embedded in the through hole.

Description

technical field [0001] The present invention relates to an excimer lamp device, for example, an excimer lamp device applied to a dry cleaning device for cleaning a liquid crystal substrate. Background technique [0002] As disclosed in Patent Document 1, in the conventional excimer lamp device, a plurality of excimer lamps composed of a discharge gas formed by dielectric barrier discharge to form excimer molecules are arranged in parallel in the lampshade and stored, and are installed and taken out in the lampshade. A glass irradiation window for ultraviolet rays emitted from excimer molecules. However, as the size of the substrate of the object to be processed increases in recent years, it is difficult to manufacture a large glass irradiation window, so as disclosed in Patent Documents 2 and 3, no glass irradiation window is provided. At this time, in order to install the excimer lamp in the atmosphere, nitrogen gas is sprayed around it to reduce the oxygen concentration, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F21V19/00F21V21/00H01J65/00
CPCH01J5/50H01J9/247H01J61/54H01J65/046H05B41/2813
Inventor 菅敏幸远藤真一
Owner USHIO DENKI KK
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