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Completely-integrated impact piece ignitor and preparation method thereof

A fully integrated, point-and-shoot technology, applied in chemical instruments and methods, instruments, offensive equipment, etc., can solve the problems of limited application, difficult to guarantee the vertical verticality of the acceleration chamber, and difficult to guarantee the airtightness and strength of the bonding. Improves flyer speed, facilitates mass production, and improves process consistency

Inactive Publication Date: 2010-01-06
INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] a) The ignition element of the igniter uses a polysilicon bridge, and the ignition time needs tens of microseconds, which limits its application in some occasions that require fast action
[0005] b) The accelerating chamber of the igniter is prepared by electrochemical corrosion process, and the longitudinal verticality of the accelerating chamber is difficult to guarantee
[0006] c) The reflector of the igniter is bonded to the polysilicon bridge by epoxy resin, and the airtightness and strength of the bonding with the polysilicon bridge are difficult to guarantee

Method used

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  • Completely-integrated impact piece ignitor and preparation method thereof
  • Completely-integrated impact piece ignitor and preparation method thereof
  • Completely-integrated impact piece ignitor and preparation method thereof

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Embodiment Construction

[0021] figure 1 It is a structural schematic diagram of the fully integrated impact plate igniter of the present invention, figure 2 yes figure 1 The schematic diagram of the A-A section in the image 3 yes figure 1 B-B in the cross-sectional schematic diagram, from Figure 1~3 It can be seen from the figure that the fully integrated shock plate igniter of the present invention contains a glass reflector 7 , a metal bridge foil 9 , a silicon flyer 5 and a silicon acceleration chamber 1 . The metal bridge foil 9 is arranged above the glass reflector 7, the metal bridge foil 9 is closely connected with the silicon flyer 5, the silicon acceleration chamber 1 is arranged above the silicon flyer 5, and two Silicon oxide insulating material layer 4 .

[0022] The preparation method of the fully integrated impact plate igniter of the present invention is carried out in sequence as follows:

[0023] a) A copper metal layer with a thickness of 4 mm is sputtered on a borosilicate...

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Abstract

The invention discloses a completely-integrated impact piece ignitor and a preparation method thereof, which belong to the technical filed of initiators and pyrotechnics. On the basis of a micro electronic mechanical system (MEMS) processing technology, the assembly can be finished in the process of processing a bridge foil, a flying plate, an accelerating chamber and a reflection plate, thus thepreparation method is beneficial to improving the assembly precision of devices. In addition, the completely-integrated impact piece ignitor has the characteristic of parallel processing of an integrated circuit, is convenient to produce in large batch and reduces the manufacturing cost, and is beneficial to improving the consistency and the reliability of the process; and meanwhile, by using themetal bridge foil, the completely-integrated impact piece ignitor has short igniting time and can be widely applied to ignition of a plurality of novel high and safe initiators and pyrotechnics.

Description

technical field [0001] The invention belongs to the technical field of pyrotechnics, in particular to a fully integrated impact plate igniter based on micro-electro-mechanical system (MEMS) processing technology and a preparation method thereof. Background technique [0002] The main components of traditional shock detonators include bridge foil substrate, bridge foil, flyer, accelerating chamber, reflector and detonating explosive column. The bridge foil is made by etching copper-clad foil on the insulating dielectric substrate. The insulating dielectric substrate is usually made of alumina ceramic substrate, which also acts as a reflector. The flyer is usually a piece of polyimide glued on the bridge foil. Amine or polyester film (mylar film), the upper part of the flyer has a sapphire or stainless steel acceleration chamber with a diameter about 1.2 to 1.5 times the width of the bridge foil, and the upper part of the acceleration chamber is an explosive column with an alu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F42C19/12B81C1/00B81C3/00B81C5/00
Inventor 施志贵席仕伟杨黎明张茜梅刘娟唐海林
Owner INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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