PVD nano composite ceramic coating screw and method for manufacturing same
A ceramic coating and nano-composite technology, applied in coating, metal material coating process, ion implantation plating, etc., to achieve the effect of easy large-scale promotion, overcoming expensive price and simple structure of coating equipment
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Embodiment 1
[0019] Example 1: Under the atmosphere of argon gas at 350°C, the nitriding-treated screw is glow-discharge cleaned, and the cleaning bias is -1000V; The transition metal Cr layer; then deposit 4 micron CrN / CN composite superhard coating under the conditions of 400°C, -200V bias, and 0.5Pa pressure; A 2-micron Cr-doped diamond-like carbon film was deposited under 0.5Pa air pressure; after the manufacture, it was naturally cooled to obtain a PVD nanocomposite ceramic-coated screw. The hardness of the surface coating of the ceramic coated screw was tested by the indentation method of the obtained screw, and the hardness of the surface coating of the ceramic coated screw was 42GPa. The thickness of the coating was measured by the optical interference method to be about 6 microns, and the coefficient of friction of the coating was tested by a friction and wear instrument to be 0.15.
Embodiment 2
[0020] Example 2: Under the environment of 400°C and argon gas, the nitriding-treated screw is glow-discharge cleaned, and the cleaning bias is -900V; The transition metal Ti layer; then deposit a 3-micron TiN / CN composite superhard coating under the conditions of 350°C, -150V bias, and 0.4Pa pressure, and the TiN crystal grain size is controlled below 10 nanometers; when the main wear-resistant layer is deposited, A 3-micron Ti-doped diamond-like carbon film was deposited under the conditions of 100°C, -80V bias voltage, and 0.4Pa air pressure; after the manufacturing was completed, it was naturally cooled to obtain a PVD nanocomposite ceramic-coated screw. The hardness of the ceramic coating screw surface coating is Hv greater than 45GPa, the coating thickness is about 6 microns, and the coating friction coefficient is 0.1.
Embodiment 3
[0021] Example 3: Under the environment of 400°C and argon gas, the nitriding-treated screw is glow-discharge cleaned, and the cleaning bias is -1200V; The transition metal Zr layer; then deposit a 3 micron ZrN / CN nanocomposite superhard coating under the conditions of 380°C, -200V bias, and 0.6Pa pressure; 1. Deposit 2 micron Ti-doped diamond-like carbon film under 0.3Pa air pressure condition; naturally cool after manufacturing, and obtain PVD nanocomposite ceramic coating screw. The hardness of the ceramic coating screw surface coating is Hv greater than 43GPa, the coating thickness is about 5 microns, and the coating friction coefficient is 0.18.
[0022] figure 1In order to implement the PVD equipment adopted in the present invention, the vacuum chamber 1 is surrounded by furnace walls, and the vacuum chamber is provided with a vacuum port and a working gas release port. An arc target 2 , a magnetron target 5 , a receipt device 3 and an independent workpiece holder 4 ar...
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