Method for manufacturing linear change gradient coating of TiAlCN non-metallic element

A non-metal element and gradient coating technology, which is applied in metal material coating process, coating, ion implantation plating, etc., can solve the problem of insufficient stability of film performance, large internal stress of multi-layer coating, and easy oxidation of the film layer etc. to achieve excellent surface finish, reduce residual stress, and improve tool cutting performance

Active Publication Date: 2008-12-10
XIAMEN GOLDEN EGRET SPECIAL ALLOY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the coating prepared by PVD technology has the advantages of high hardness, low friction coefficient, good wear resistance and chemical stability, there are still some disadvantages. For example, TiN / TiC coating has microscopic Low hardness, brittle performance, not impact resistance and other shortcomings; another example, multi-layer coatings still have the problem of large internal stress, which makes the performance of the film layer not stable enough during cutting; another example, TiCN, TiC / TiN coatings in cutting When the temperature is high, there is the disadvantage that the film layer is easily oxidized and ablated; for example, most of the existing coatings have the problem of easy sticking to the knife when processing viscous materials, etc.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] Embodiment 1, a method for making a TiAlCN non-metallic element linear change gradient coating of the present invention is to use the PVD method for coating treatment. The coating treatment process is divided into four consecutive time periods, and the process includes the following steps :

[0045] a. In the first period of time, only nitrogen N2 is passed into the furnace cavity, the flow rate of nitrogen N2 is 500sccm, the evaporation current of Ti target is 170A, and the temperature is 350℃~450℃, so that the surface of the substrate is coated with a Layer height and dense TiN intermediate layer, the thickness of the TiN intermediate layer is 0.2~0.8um;

[0046] b. In the second period of time, argon Ar, nitrogen N2, and acetylene gas C2H2 are introduced into the furnace cavity at the same time, the flow rate of argon Ar is controlled at 700 sccm and remains unchanged, the evaporation current of the TiAl alloy target is 140A, and the temperature is controlled At 430...

Embodiment 2

[0058] Embodiment 2, a method for making a TiAlCN non-metallic element linear change gradient coating of the present invention, differs from Embodiment 1 in that:

[0059] In step a, the flow rate of nitrogen N2 is 400 sccm, and the evaporation current of Ti target is 160A;

[0060] In step b, the flow rate of argon gas Ar remains constant at 800 sccm, and the evaporation current of the TiAl alloy target is 130 A; as the coating progresses, the flow rate of nitrogen N2 drops from 480 sccm to 140 sccm at a constant speed, and the flow rate of acetylene gas C2H2 decreases from 8 sccm Rise to 75sccm at a constant speed;

[0061] In step c, the flow rate of argon gas Ar is adjusted from 800 sccm to 600 sccm at a constant speed, the flow rate of nitrogen N2 is adjusted from 140 sccm to 350 sccm at a constant speed, the flow rate of acetylene gas C2H2 is adjusted from 75 sccm to 150 sccm at a constant speed, and the evaporation current of the TiAl alloy target is 130A;

[0062] In ...

Embodiment 3

[0064] Embodiment three, a kind of TiAlCN nonmetallic element linear change gradient coating manufacturing method of the present invention, differs from embodiment one in that:

[0065] In step a, the flow rate of nitrogen N2 is 550 sccm, and the evaporation current of Ti target is 180A;

[0066] In step b, the flow of argon Ar is kept constant at 500 sccm, and the evaporation current of the TiAl alloy target is 150 A; as the coating progresses, the flow of nitrogen N2 drops from 520 sccm to 160 sccm at a constant speed, and the flow of acetylene gas C2H2 decreases from 12 sccm Rise to 85sccm at a constant speed;

[0067] In step c, the flow rate of argon gas Ar is adjusted from 500 sccm to 600 sccm at a constant speed, the flow rate of nitrogen N2 is adjusted from 160 sccm to 350 sccm at a constant speed, the flow rate of acetylene gas C2H2 is adjusted from 85 sccm to 150 sccm at a constant speed, and the evaporation current of the TiAl alloy target is 150A;

[0068] In the ...

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PUM

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Abstract

The invention discloses a method for preparing a TiAlCN non metallic element linear variation gradient coating. The coating treatment which adopts the PVD method is divided into four continuous time sections; in the second time section, a furnace chamber is simultaneously filled with argon gas(Ar), nitrogen gas(N2) and acetylene gas(C2H2), wherein the flow rate of the argon gas(Ar) is kept constant, the flow rate of the nitrogen gas(N2) decreases or increases at an uniform speed and the flow rate of the acetylene gas(C2H2) increases or decreases at an uniform speed so that the TiAlCN gradient coating with non metallic element linear variation is formed; the coating prepared by the method has the advantages of high surface finish, strong anti-stripping capability and good anti-knife bonding performance, is more suitable for finishing machining, and particularly shows excellent performances in processing materials with strong viscidity at the medium and low speed under the condition of water solution cooling.

Description

technical field [0001] The invention relates to a coating of a cutting tool, in particular to a preparation method of a TiAlCN non-metallic element linearly changing gradient coating. Background technique [0002] Coating treatment of cutting tools is one of the important ways to improve the performance of cutting tools. Coated cutting tools have the characteristics of high surface hardness, good wear resistance, stable chemical properties, heat resistance and oxidation resistance, small friction factor and low thermal conductivity. Compared with uncoated cutting tools, it can increase the service life by more than 3~5 times, increase the cutting speed by 20%~70%, improve the machining accuracy by 0.5~1 grade, and reduce the consumption cost of cutting tools by 20%~50%. The surface coating technology of cutting tools is a high-quality surface modification technology developed as a market demand. Because this technology can obtain excellent comprehensive mechanical properties...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/26C23C14/06C23C14/54
Inventor 刘浩郭生舟吴高潮
Owner XIAMEN GOLDEN EGRET SPECIAL ALLOY
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