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Process for preparing zirconia coating

A preparation process, zirconia technology, applied in metal material coating process, coating, ion implantation plating, etc., can solve problems that have not been seen in reports, and achieve uniform and dense structure, uniform and dense structure, and high ionization rate Effect

Inactive Publication Date: 2008-11-19
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] So far, ZrO has been prepared by arc ion plating technology. 2 or Y 2 o 3 Stable ZrO 2 Coating reports have not been seen

Method used

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  • Process for preparing zirconia coating
  • Process for preparing zirconia coating
  • Process for preparing zirconia coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] This embodiment is to deposit ZrO on the 1Cr18Ni9Ti stainless steel substrate 2 Coating, sample size is 15×10×2mm 3 . The substrate is ground, cleaned and polished with metallographic sandpaper. Depositing ZrO on Domestic MIP-8-800 Arc Ion Plating Equipment 2 coating, the cathode target material is metal zirconium (99%, wt.%), and the vacuum degree of the vacuum chamber is evacuated to 7×10 -3 After Pa, Ar gas was introduced to raise the pressure in the furnace to about 2×10 -1 Pa, apply a high bias voltage of -800 ~ -1000V, and clean the surface of the sample by arc light bombardment for 2 ~ 5 minutes, and then pass O 2 deposited ZrO 2 For coating, the target base distance is about 240mm; the substrate temperature is about 300-400°C; the pulse bias voltage is -100-300V, the duty cycle is 20-40%; the arc voltage is 20-40V, and the arc current is 60-70A.

[0024] Change the oxygen flow in the range of 60-400sccm to prepare ZrO with different components and differen...

Embodiment 2

[0026] This embodiment is to deposit ZrO on the DZ125 superalloy with Ni32Co20Cr8Al0.5Y (wt.%) coating on the surface 2Coating, sample size is 15×10×2mm 3 . The substrate is ground with metallographic sandpaper, cleaned and water blasted (220 mesh hollow glass pellets). The deposition parameters are the same as in Example 1. Same as Example 1, the oxygen flow rate can be prepared in the range of 134~400sccm close to ZrO 2 Stoichiometric coating with monoclinic ZrO 2 phase-based. Figure 3(a)-(c) shows the typical ZrO deposited on the DSM11 superalloy with NiCoCrAlY coating deposited on the surface 2 The surface, polished section and fracture morphology of the coating, it can be seen that ZrO 2 The columnar growth of the coating along the growth direction is more obvious, and the ZrO 2 The coating is grown on the basis of the arc ion plating MCrAlY coating, which determines that it has a similar MCrAlY coating surface on the surface, showing an obvious ridge-like morpholo...

Embodiment 3

[0028] This embodiment is to deposit Zr(Y)O on the DZ125 superalloy with Ni32Co20Cr8Al0.5Y (wt.%) coating on the surface 2 Coating, sample size is 15×10×2mm 3 . The substrate is ground with metallographic sandpaper, cleaned and water blasted (220 mesh hollow glass pellets). Deposition of Zr(Y)O in Domestic MIP-8-800 Arc Ion Plating Equipment 2 Coating, the cathode target material is ZrY (containing 8wt% Y) alloy target material, the target base distance is about 240mm, and the vacuum degree of the vacuum chamber is evacuated to 7×10 -3 After Pa, Ar gas was introduced to raise the pressure in the furnace to about 2×10 -1 Pa, apply a high bias voltage of -800 ~ -1000V, and clean the surface of the sample by arc light bombardment for 2 ~ 5 minutes, and then pass O 2 Deposit Zr(Y)O 2 For coating, the oxygen flow rate is controlled within the range of 134-400sccm; the substrate temperature is about 300-400°C; the pulse bias voltage is -100-300V, the duty cycle is 20-40%; the a...

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Abstract

The invention relates to a coating preparation technology, in particular to a technique for preparing a zirconia coating, which is to adopt the arc ion plating technology and utilize pure Zr or ZrY alloy target materials for deposition reaction of a ZrO2 coating or a Zr(Y)O2 coating on an alloy substrate or an arc ion plating MCrAlY coating in O2 atmosphere. The technique for preparing the zirconia coating has the advantages of good technical repeatability, easy realization of industrial production and so on; the ZrO2 coating or the Zr(Y)O2 coating prepared has uniform and compact texture, is a cylindrical crystal structure, and has good bonding strength; and the Zr(Y)O2 coating has good thermal shock resistance.

Description

technical field [0001] The invention relates to coating preparation technology, in particular to a preparation technology of zirconia coating. Background technique [0002] Zirconia (ZrO 2 ) is a coating material with great development potential. It has excellent properties: (1) It has a high coefficient of linear expansion (9×10 -6 ~11.5×10 -6 / K), close to metal materials; (2) ZrO 2 The thermal conductivity of the material is small (1W / m·K), and in the presence of pores and cracks, Y 2 o 3 Stable ZrO 2 The thermal conductivity value of the material is usually between 0.8 and 1.7W / m·K, especially at a high temperature of 1000°C, its thermal conductivity value is the lowest (2.3W / m·K) among all dense ceramic materials. (3) ZrO 2 The melting point of the material is as high as 2700 ° C, and it has good high temperature stability; (4) Y 2 o 3 Stable ZrO 2 The hardness of the material reaches 14GPa, and the elastic modulus is 50GPa, which has good mechanical propertie...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/22C23C14/54
Inventor 孙超王启民宫骏王铁刚刘山川华伟刚鲍泽斌肖金泉闻立时
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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