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Simple atmosphere pressure suspending electrode cold plasma fluid generator

A technology of cold plasma and jet generator, applied in the directions of plasma, circuit, discharge tube, etc., can solve the problems of reducing the stability of the atmospheric pressure cold plasma jet, increasing the complexity of operation, control and maintenance, and the structure of the jet source being complicated. , to achieve the effect of improving energy utilization, long continuous working time, and optimizing jet characteristics

Inactive Publication Date: 2008-08-27
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, most low-temperature plasmas are produced by gas discharge at a low pressure of several hundred Pa, but for large-scale industrial production, there are two important disadvantages of low-pressure plasma: (1) the discharge and reaction chamber are in a low-pressure state, A vacuum system is required, which requires high investment and complicated application; (2) The efficiency of batch processing is low. It is necessary to continuously open the vacuum chamber to take out the finished product and add the test product, and then re-vacuumize and fill the working gas, which is difficult for continuous production
Traditional atmospheric pressure-cooled plasma jet devices are mostly produced by dielectric barrier radio frequency inductive coupling or capacitive coupling discharge in quartz tubes, but for this plasma jet produced by radio frequency discharge in dielectric barrier mode, when the radio frequency power input exceeds a certain range , the RF plasma jet is easily transformed into a high-temperature arc with poor uniformity, which reduces the stability of the atmospheric pressure-cooled plasma jet
At the same time, the structure of the traditional jet source is relatively complex, and the application of radio frequency power also increases the complexity of operation, control and maintenance

Method used

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specific Embodiment

[0024] Using high-purity argon with a purity of 99.999% as the working gas, the lower limit of the flow rate that can produce steady-state jets and unsteady-state jets is 0.08m 3 / h. When the flow rate is 0.26m 3 / h, the threshold voltage and jet characteristics of each stage are as follows:

[0025] 1. When a discharge is generated between two needle electrodes, the breakdown threshold for forming a low-intensity micro-arc is 2.7kV.

[0026] 2. Further increase the voltage, the voltage range of steady-state jets is 3.6kV-4.4kV; the macroscopic temperature range of steady-state jets is 18.7°C-22.3°C, and the electron excitation temperature is 3329K-3715K; the length of the jets is always kept at about 60mm .

[0027] 3. Continue to increase the voltage, the voltage range of the unsteady jet is 4.4kV-5.6kV; the electron excitation temperature is 3329K-4405K; the length of the unsteady jet is slightly shorter than the steady jet, about 40mm-60mm.

[0028] 4. When the applied...

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Abstract

The invention relates to a simple cold plasma jet flow generating device for the barometric suspended electrode, which belongs to the technical field of the plasma discharging reactor. The cold plasma jet flow generating device is characterized in that a main body of the device is a millimeter magnitude quartz tube, a gas inlet opening is arranged at one end connected with a gas supplying source, and a jet flow outlet opening is arranged at the other end; a pair of needle electrodes are embedded into the quartz tube above the jet flow outlet opening, both the electrodes are symmetrical in the radial direction, the needle electrode at one side connected with an alternating current power supply is adopted as a power electrode, and the other electrode at the other side is suspended in the air and adopted as the suspended electrode; through applying voltage, the electrodes discharge to generate plasmas which are sprayed out of the tube to form the jet flow through the action of flowing air. The jet flow generating device has the advantages that the needle electrode structure can reduce the generation of the jet flow and maintain the voltage; the suspended electrode is favorable not only for enhancing the utilization factor of the energy, but also for effectively controlling the discharging intensity and maintaining the stable discharging; the non-pressure plasma jet flow is characterized in low temperature, large length, low produced and maintained voltage, long continuous working time and simple structure.

Description

technical field [0001] The invention belongs to the technical field of plasma discharge reactors, and relates to a cold plasma jet generator, in particular to a simple atmospheric pressure suspension electrode cold plasma jet generator. Background technique [0002] The ions, electrons, excited atoms, molecules and free radicals enriched in the low-temperature plasma space are extremely active reactive species. These active particles have a large number, variety and high activity, and are easy to react with the surface of the material they are in contact with. Therefore, in recent years, low-temperature plasma has been used in sterilization, surface modification (improving the wettability, water absorption, printing and dyeing, adhesion and conductivity of paper, film, textiles and fibers), thin film deposition, etching, etc. Processing, device cleaning and other fields have been more and more widely used. At present, most low-temperature plasmas are produced by gas dischar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/30H01J37/32
Inventor 聂秋月任春生王德真
Owner DALIAN UNIV OF TECH
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