Self-aligning micro spray nozzle with control grid
A control grid and self-alignment technology, applied in printing and other directions, can solve the problems of narrowing the application field of EHD printing technology, complex structure, and pitch changes
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[0013] Such as Figure 1~4 As shown, the present invention is provided with upper silicon chip 1 and lower layer silicon chip 2, sputters a layer of gold thin film on upper layer silicon chip 1 upper surface as upper layer electrode 3, is provided with liquid inlet hole 6 on upper layer silicon chip 1, enters A solid needle tip 7 is provided below the liquid hole 6, a ring-shaped positioning hole 9 is provided in the upper silicon wafer 1, and a layer of SiO is grown on the upper surface of the lower silicon wafer 2 by thermal oxidation. 2 The thin film is used as the insulating layer 4, and the upper surface of the lower silicon wafer 2 is provided with a positioning ring 8 which is nested with the ring-shaped positioning hole 9 arranged in the upper silicon wafer 1, and a layer of gold thin film is sputtered on the back of the lower silicon wafer 2 as The control grid 5 is provided with a nozzle outlet 10 in the middle of the lower silicon wafer 2 .
[0014] The solid needl...
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