Solid-state imaging device and electronic device
A solid-state imaging device and pixel technology, which is used in semiconductor/solid-state device manufacturing, radiation control devices, televisions, etc., can solve the problems of increased metal wiring wiring capacitance and reduced conversion efficiency, and achieves reduced parasitic capacitance, enhanced conversion efficiency, and enhanced The effect of pixel conversion efficiency
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[0095] Some examples of the present invention will be described.
[0096] The first example of the invention will refer to Figures 21A to 21C to describe.
[0097] In the solid-state imaging device 1 in this example, the doping concentration in the FD, specifically, the doping concentration in the extended implant region 25a of the pixel 2 is lower than that in the impurity diffusion layer of the transistor of the peripheral circuit 3 . According to the impurity diffusion layer in the transistor of the peripheral circuit 3, usually the extended implantation region 25a has a surface impurity concentration of 1×10 20 / cm 3 or more to inject impurities. However, in the solid-state imaging device 1 of the present example, the impurity concentration of the extended implant region 25a is as low as one-tenth to one-hundredth of the surface impurity concentration.
[0098] Image quality may be prioritized in this configuration because contact resistance typically increases, but ...
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