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Uncooled infrared imaging focal plane array detector

A focal plane array, uncooled infrared technology, used in instruments, measuring devices, scientific instruments, etc., can solve problems such as reflection, achieve the effects of sensitive detection, reduce infrared loss, and improve plane utilization

Active Publication Date: 2010-01-20
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0009] In view of this, the main purpose of the present invention is to provide a kind of uncooled infrared imaging focal plane array detector, to solve the problem that the silicon substrate in the pattern area reflects infrared rays, improve the detection sensitivity and the absorptivity to incident infrared rays

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  • Uncooled infrared imaging focal plane array detector
  • Uncooled infrared imaging focal plane array detector
  • Uncooled infrared imaging focal plane array detector

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Embodiment Construction

[0038] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0039] Such as figure 1 Show, figure 1 Schematic diagram of the structure of the uncooled infrared imaging focal plane array detector provided by the present invention. The detector is composed of micro-cantilever units in a sequential tiling manner, and the micro-cantilever units include thermal deformation structures, infrared absorption structures and support beams. Wherein, there are two groups of thermally deformable structures, located on both sides of the infrared absorbing structure, one end of each group of thermally deformable structures is connected to the support beam, and the other end is connected to the infrared absorbing structure; the infrared absorbing structure includes an optical detection plate 2 and...

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Abstract

The invention discloses a focal plane array detector of uncooled infrared imaging, which relates to a technical filed of infrared imaging. The detector comprises micro-cantilever units tiled flatly in order; the micro-cantilever unit comprises a thermal deformation structure, an infrared absorption structure and a support beam; the thermal deformation structure has two groups respectively arranged on two sides of the infrared absorption structure and one end of each group of the thermal deformation structure is connected with the support beam while the other end of each group of the thermal deformation structure is connected with the infrared absorption structure; the infrared absorption structure comprises an optical detection plate and an infrared transmission plate which are fixed and connected with each other through a fluke; the thermal deformation structure is connected with the optical detection plate of the infrared absorption structure and is distributed on the same plane with the optical detection plate of the infrared absorption structure. The adoption of the invention solves the problems that silicon substrate in graphic area reflects the infrared as well as facilitates detection sensitivity and absorption rate of incident infrared.

Description

technical field [0001] The invention relates to the technical field of an uncooled infrared focal plane array detector in an infrared imaging system, in particular to an uncooled infrared imaging focal plane array detector. Background technique [0002] Infrared radiation detection devices are used to convert invisible infrared radiation into visible images. According to different detection principles, traditional infrared radiation detection devices can be roughly divided into two categories: quantum type and thermal type infrared radiation detectors. [0003] Quantum-type infrared radiation detectors convert the energy of infrared photons into the energy of electrons. Since the energy of the excited electrons of infrared photons of 8 to 14 microns is equivalent to the energy generated by the thermal motion of electrons at room temperature, it is necessary to maintain the temperature of the detector at the temperature of liquid nitrogen (about 77K) to suppress the thermal ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02G01J5/02G01J5/38
Inventor 焦斌斌李超波陈大鹏叶甜春
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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