Optical-mechanical double-layer structural uncooled infrared imaging focal plane array detector

Abstract

The invention discloses an optical-mechanical focal plane array detector of uncooled infrared imaging with double layer, relating to a technical field of the focal plane array detector of uncooled infrared imaging in an infrared imaging system. The detector comprises micro-cantilever units mutually covered, tiled and embedded ; the micro-cantilever unit comprises a thermal deformation structure, an infrared absorption structure and a support beam; the thermal deformation structure is fixed on and connected with the support beam; the infrared absorption structure and the thermal deformation structure are fixedly connected on different planes; infrared absorption plates of each micro-cantilever unit are covered above the thermal deformation structure of the micro-cantilever next to the infrared absorption plates to form a micro-cantilever unit array mutually covered, tiled and embedded. The adoption of the invention solves the problem that silicon substrate reflects the infrared in graphic area, facilitates detection sensitivity; solves the problem of over-large elemental area of the devices and promotes resolution and definition of the detection.

Description

technical field [0001] The invention relates to the technical field of an uncooled infrared focal plane array detector in an infrared imaging system, in particular to an optical-mechanical double-layer uncooled infrared imaging focal plane array detector. Background technique [0002] Infrared radiation detection devices are used to convert invisible infrared radiation into visible images. According to different detection principles, traditional infrared radiation detection devices can be roughly divided into two categories: quantum type and thermal type infrared radiation detectors. [0003] Quantum-type infrared radiation detectors convert the energy of infrared photons into the energy of electrons. Since the energy of the excited electrons of infrared photons of 8 to 14 microns is equivalent to the energy generated by the thermal motion of electrons at room temperature, it is necessary to maintain the temperature of the detector at the temperature of liquid nitrogen (abo...

AI Technical Summary

Problems solved by technology

[0009] In view of this, the main purpose of the present invention is to provide an optical-mechanical double-layer structure uncooled infrared imaging focal plane array detector, to overcome the problem of infrared reflection of the silicon substrate in the pattern area, improve detection sensitivity, and solve the problem of device imaging. Solve the problem of large pixel area, improve the resolution and clarity of detection

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