Optical-mechanical double-layer structural uncooled infrared imaging focal plane array detector
An uncooled infrared and focal plane array technology is applied in the field of opto-mechanical double-layer structure uncooled infrared imaging focal plane array detectors, which can solve the problems of large pixel area and reflection, and achieve pixel area reduction and detection. Sensitive, overall length-increasing effect
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[0032] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0033] Such as figure 1 Show, figure 1 Schematic diagram of the structure of the photo-mechanical double-layer uncooled infrared imaging focal plane array detector provided by the present invention. The detector is composed of micro-cantilever units in a way of covering and nesting each other. The micro-cantilever unit includes an infrared absorbing plate 1, a thermally deformable structure 2, and a support beam 3. The infrared absorbing plate of each micro-cantilever unit 1 is covered on the thermally deformed structure 2 of another adjacent micro-cantilever unit to form an array of micro-cantilever units covering and nesting each other.
[0034] Such as figure 2 as shown, figure 2 The top view of the micro-cantile...
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