Self-aligned tunable metamaterials

Abstract

A self-aligned tunable metamaterial is formed as a wire mesh. Self-aligned channel grids are formed in layers in a silicon substrate using deep trench formation and a high-temperature anneal. Vertical wells at the channels may also be etched. This may result in a three-dimensional mesh grid of metal and other material. In another embodiment, metallic beads are deposited at each intersection of the mesh grid, the grid is encased in a rigid medium, and the mesh grid is removed to form an artificial nanocrystal.

Description

BACKGROUND[0001]1. Field of the Disclosure[0002]This disclosure relates to the field of tunable metamaterials, and more particularly to self-aligned arrays of nanomaterials.[0003]2. Description of the Related Art[0004]Metamaterials are synthetic, composite materials with periodic structures, known for their ability to create electromagnetic or acoustic properties that are not found in nature and that may determine how the material interacts with various types of radiation. Metamaterials may direct radiation either due to the external shape of a metamaterial structure or by spatially indexing the metamaterial. Conventional methods of forming metamaterial periodic and spatially indexed arrays in the nanoscale range, such as ion beam methods, are limited by processing options, materials, and ultimately, economic feasibility, and may be poorly suited to gain widespread industrial applicability. Therefore, there is a need in the art for an industrial method of producing desired tunable n...

AI Technical Summary

Benefits of technology

The patent text describes a method for producing self-aligned metamaterials, which are synthetic materials that can be used to create electromagnetic or acoustic properties that are not found in nature. These materials have been created using nanowires and other techniques that can be limited in terms of processing options and materials selection. The patent proposes an industrial method for producing these materials in large quantities at low cost. The technical effects of the patent include the creation of a new method for producing self-aligned metamaterials and the ability to control the electromagnetic properties of these materials in space, which can be useful in various applications such as sensors, reflectors, and imaging devices.

Problems solved by technology

Conventional methods of forming metamaterial periodic and spatially indexed arrays in the nanoscale range, such as ion beam methods, are limited by processing options, materials, and ultimately, economic feasibility, and may be poorly suited to gain widespread industrial applicability.

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