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Semiconductor switches and switching circuits for microwave

a technology of switching circuits and switches, applied in the field of microwave switches, can solve the problems of reduced yield, increased loss due to reflection, and difficult to maintain low insertion loss, and achieve high isolation. , the effect of reducing the resistance “r”

Inactive Publication Date: 2006-09-07
MIZUTANI HIROSHI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The present invention provides semiconductor switches and switching circuits that can solve problems of high loss and low isolation in conventional switches. The switches and circuits have the ability to function as a coplanar line without loss in the ON state and with loss in the OFF state. The isolation of the switches gradually increases on frequency, and the resistance value determining isolation depends on the distance between the gate and the source or drain. The switches are compact and have lower loss and higher isolation compared to conventional examples."

Problems solved by technology

As a result, a signal pass where a diode is biased in the reverse direction allows signals to travel transparently, but on the other hand, an increase in frequency will result in an increase in loss due to reflection.
On the contrary, FETs as well as PIN diodes, etc., normally have variation of forming process to a certain extent, but for example, due to this variation, the value of capacitance C could deviate from the design, and as a result the resonance frequency will deviate from the design as well, and resonance will not be available at a desired frequency, which, as a consequence, will give rise to reduction of yield.
However, not only in switching circuits of the above-described Conventional example 1 as well as Conventional example 2 without doubt, but also in switching circuit of Conventional example 3 it was practically difficult to maintain low insertion loss and realize high isolation in a wide band as a comparatively compact type.
As understandable from these features, in microwave or millimeter wave band switching circuits there was a problem that it was difficult for the prior art to realize high isolation of not less than 80 dB covering a wide band width with a comparatively small type configuration, while maintaining low insertion loss.

Method used

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  • Semiconductor switches and switching circuits for microwave
  • Semiconductor switches and switching circuits for microwave
  • Semiconductor switches and switching circuits for microwave

Examples

Experimental program
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first embodiment

[0061] In the present example, a heterojunction FET of AlGaAs and InGaAs systems was used as the FET in the above-described In detail, referring to FIG. 1B, a n-AlGaAs layer is formed on an i-GaAs layer. An i-InGaAs layer as a channel layer is formed on the n-AlGaAs layer. A n-AlGaAs layer is formed on the i-InGaAs layer. 2 n+-GaAs layers are formed on the n-AlGaAs layer apart from each other. The gate electrode 6 is formed on the n-AlGaAs layer between the n+-GaAs layers. The gate electrode 6 is made by aluminum, gold, molybdenum, titanium, or tungsten silicide. The source electrode 4 is formed on one of the n+-GaAs layer. The drain electrode 5 is formed on the other of the n+-GaAs layer. The source and drain electrodes are made by an alloy including AuGe or nickel. In addition, the area of the gate electrode 6 was set to 2×400 μm, and the distances between the gate electrode 6 and the source electrode 4 or the drain electrode 5 were set to 2.5 μm. Moreover, the first input-output...

third embodiment

[0080]FIG. 11 is a graph showing frequency characteristics on insertion loss as well as isolation of the semiconductor switch according to the other example in correspondence with the In the present example, the area of the anode electrode 7 was set to 10×400 μm, and the distance between the cathode electrode 8 and the anode electrode 7 was set to 2.5 μm. In addition, the first input-output terminal 1 and the second input-output terminal 2 are respectively connected with both the ends of the anode electrode 7, and further, 50 Ω loads are respectively connected with the first input-output terminal 1 and the second input-output terminal 2. Capacitance with zero bias between the cathode and the anode is 20 fF per 100 μm, and on the other hand, resistance with forward bias is 3.3 Ω per 100 μm. In addition, entire length of the coplanar line is 400 μm.

[0081] In the semiconductor switch according to the present example comprising such configuration, unlike the foregoing example, the case...

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Abstract

The purpose of the present invention is to provide a small-sized switch attaining high isolation of not less than 80 dB, maintaining low insertion loss also in high frequencies not less than 60 GHz. A semiconductor switch according to the present invention utilizes FETs a gate electrode, a source electrode, and a drain electrode of each of which are formed on a semiconductor. The source electrode and the drain electrode are connected with the earth as well as are disposed in parallel to each other, and the gate electrode is formed between the source electrode and the drain electrode, and both the ends of the gate electrode are connected to the first input-output terminal 1 and the second input-output terminal.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] This invention relates to semiconductor switches, and in particular to semiconductor switches for microwave as well as millimeter wave bands using a transmission line comprising a dielectric substance substrate and metal conductors, and diodes or field effect transistors (FETs) showing distributed parameter effect. [0003] 2. Description of the Prior Art [0004] As a semiconductor switching circuit which is contemplated for use in microwave as well as millimeter wave bands, in particular with high frequencies not less than 60 GHz, various kinds of circuits have been proposed and manufactured for trial. [0005] Single-pole 3-throw (SP3T) switches for the 77 GHz band (hereinafter to be referred to as Conventional example 1) were reported by M. Case et al. in “1997 MTT-S IMS Digest pp. 1047-1050” and can be nominated as an example of conventional switches. [0006] An SP3T switch of Conventional example 1 comprises configur...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L31/0328H01L29/872H01L27/095H01L29/47H01L29/861H01P1/15H01P3/02
CPCH01L29/7783H01P1/15
Inventor MIZUTANI, HIROSHI
Owner MIZUTANI HIROSHI
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