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Method for encapsulating crystal circular piled multi-chips

A packaging method and multi-chip technology, applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve the problems of increasing the difficulty of the manufacturing process, complicated and time-consuming, chip fragmentation, etc., to improve the problem of fragmentation, increase memory capacitance, and improve process efficiency. Effect

Active Publication Date: 2007-03-07
ADVANCED SEMICON ENG INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, as the chips become thinner and thinner, if the chips are thinned first and then taken out for alignment and stacking, there will be damage such as chips due to the chips being too thin.
In addition, the step of picking up and aligning the thinned chips (especially below 50um) is not only very complicated and time-consuming, but also increases the difficulty of the manufacturing process.

Method used

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  • Method for encapsulating crystal circular piled multi-chips
  • Method for encapsulating crystal circular piled multi-chips
  • Method for encapsulating crystal circular piled multi-chips

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0022] Please refer to Fig. 7 a, provide a first wafer 700 with a chip array, this chip array is made up of several first chips 702 that have not been separated, and the chip back 703 of the first wafer 700 is adhered and fixed on a tape 704. On the first glue frame 706 (film frame). The chips 702 are precut from the chip active surface 707 of the wafer 700 to a depth to define first chips 702 equidistant from each other, wherein the cut depth is less than the thickness of the wafer 700 .

[0023] Referring to FIG. 7 b , a second glue frame 708 is adhered to the chip active surface 707 of the pre-cut first chips 702 to facilitate subsequent fixing of the completely cut first chips 702 . Referring to FIG. 7 c , the first wafer is turned over with the second plastic frame 708 so that the chip backside 703 faces upward, and the first plastic frame 706 is removed. Referring to FIG. 7 d , the wafer 700 is thinned to a thickness from the chip backside 703 of the wafer 700 to form a...

no. 2 example

[0029] Referring to FIG. 8a , a first wafer 800 having a chip array (not shown) is provided, wherein the chip array is composed of several first chips that have not been separated.

[0030] Please refer to FIG. 8 b, the wafer 800 is thinned from the chip back side 803 of the wafer 800, and the chip back side 803 of the first wafer 800 is adhered and fixed on the first plastic frame 806 (film frame) with adhesive tape 804, in order to facilitate Subsequent fixation of the individually separated chips, where the thinning method cannot be limited to chemical mechanical polishing or mechanical polishing in general.

[0031] Please refer to FIG. 8c, on the chip active surface 807 of cutting the first chip 802, the first chips 802 arranged equidistantly from each other are defined, wherein the cutting depth is smaller than the thickness of the wafer 800, and the second glue frame 808 is used to divide the first chip 802 A wafer is turned over so that the backside of the chip 803 fac...

no. 3 example

[0033]Please refer to FIG. 9a, a chip array is provided, which includes a plurality of independent first chips 902 on a plastic frame 906. The first chips 902 are cut from the first wafer. The manufacturing steps can be directly referred to the above-mentioned first chip. Relevant steps of the second embodiment.

[0034] Referring to FIG. 9 b , a thinned second wafer 910 is provided, in which several chips (not shown) are arranged equidistantly, and an adhesive layer 912 is formed on the chip active surface 914 of the second wafer 910 . Wherein the adhesive layer 912 is fully formed on the second wafer 910 or selectively formed on the part of the second wafer 910 overlapping with the first chip 902, and its material can be epoxy resin, thermoplastic or B -stage glue, formed as a paste or pre-formed film, which can deposit a paste material using automated paste dispensing equipment, or if the adhesive layer 912 material is a pre-formed material, can be directly attached to the ...

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PUM

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Abstract

This invention discloses one crystal round overlapped multi-chip sealing method, which comprises the following steps: a, providing one chip array composed of several independent chips; providing second crystal circle composed of several combined second chip with one addictive layer; cutting the second crystal chip active surface to one depth; facing the second crystal circle to the back of first chip to make each second chip overlapped with first chip; processing film from second crystal circle chip to form several independent second chip overlapped on the first chip.

Description

【Technical field】 [0001] The invention relates to a packaging method for multi-chip stacking, in particular to a packaging method for wafer-level multi-chip stacking. 【Background technique】 [0002] Die packaging is used to protect the integrated circuit chip from contamination and damage. In addition, it can provide a durable electrical lead system to connect the integrated circuit chip or die to an external printed circuit board or directly into a Electronic products, to conduct reliability and electrical tests of various chips or grains. As electronic components are becoming thinner, lighter and smaller, the packaging of protection and interconnect crystal circuit chips must also respond to this trend. [0003] It is a common packaging technique to provide a multichip module package (MCM) on a single chip carrier, and the most common multichip module package (multichip module, MCM) is side-by-side ) multi-chip module package (multichip module, MCM), it is directly place...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/50
CPCH01L2224/32145H01L2224/48091H01L2224/73265H01L2924/00014
Inventor 陶恕
Owner ADVANCED SEMICON ENG INC
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