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Static broach exciting difference detection type miniature electric field sensor

An electric field sensor and sensor technology, applied in the field of sensors, can solve the problems of narrow measurement range, high cost, difficult integration, etc., and achieve the effects of improving sensitivity and precision, improving stability and large vibration amplitude.

Active Publication Date: 2006-09-13
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

The charge-inductive electric field sensors that appeared in the early days include rotary vane type and double-ball type, etc., which have the advantages of mature processing technology, large range and high precision, but have the disadvantages of large volume, complex structure, and high cost.
The optical electric field sensor has fast response speed and low noise, but has a narrow measurement range, high cost, and is not suitable for the detection of electrostatic fields.
Due to the limitations of processing technology, these sensors generally have the characteristics of large volume, complex structure, high cost and difficulty in integration, which are limited in application.

Method used

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  • Static broach exciting difference detection type miniature electric field sensor
  • Static broach exciting difference detection type miniature electric field sensor
  • Static broach exciting difference detection type miniature electric field sensor

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Embodiment Construction

[0024] The structure diagram of the electrostatic comb excitation and differential detection type miniature electric field sensor of the present invention is as figure 1 Shown, where figure 1 (a) is a top view of the present invention, and figure 1 (b) is a side view of the present invention, which is mainly composed of four parts: the electrostatic comb tooth excitation part, the shield electrode 3, the induction electrode and the supporting beam part 6.

[0025] Wherein, the electrostatic comb tooth excitation part includes a fixed comb tooth part 1 and a movable comb tooth part 2, and the comb teeth may have various shapes, and the size may be the same or inconsistent. The fixed comb tooth part 1 is fixed on the substrate 10 through a certain process, and the material of the substrate 10 may be monocrystalline silicon, polycrystalline silicon, metal or composite materials. The movable comb tooth portion 2 is connected to the shield electrode 3, and the shield electrode 3 is ...

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Abstract

A micro electric field transducer of static comb excitation differential detection type is prepared as setting positive induction electrode and negative induction electrode under shielding electrode or in the same plane of earthing shielding electrode, carrying out reciprocal and periodical vibration in said plane by shielding electrode under excitation of static comb to periodically shield and expose positive or negative induction electrode in order to let positive or negative induction electrode generate alternative induction current for realizing detection of external electric field.

Description

Technical field [0001] The invention relates to a sensor, in particular to an electrostatic comb tooth excitation and differential detection type miniature electric field sensor. Background technique [0002] Electric field sensors are widely used in many fields such as aerospace, geosciences, environmental detection and industrial production, and have a very important role. For example, in the aerospace field, in order to ensure the safe lift-off of aircraft, the aerospace department attaches great importance to the real-time detection and monitoring of the atmospheric electric field intensity before the aircraft launch; in the field of geoscience and environmental detection, electric field detection is widely used in atmospheric circulation research and geological disaster forecasting. , Weather and dust forecast, petroleum and mineral exploration, air pollution detection, etc. [0003] There are many types of electric field sensors. According to their working principles, they ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/12G01R29/00
Inventor 夏善红彭春荣白强陈绍凤
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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