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Polishing method for inner surface of tubular brittle material and material obtained by the method

A brittle material, inner surface technology, used in grinding/polishing equipment, machine tools designed for grinding the rotating surface of workpieces, grinders, etc., can solve the problems of high cost, large wear, and low polishing ability of cerium oxide paper

Inactive Publication Date: 2006-03-22
HERAEUS QUARZGLAS +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the initial polishing ability of cerium oxide paper is low, that is, the ability to grind away irregularities in the grinding of the preliminary polishing step is very low, so it is not only necessary to make the roughness of the inner surface smaller in such a preliminary polishing step, And it also needs to replace new cerium oxide paper frequently, which is due to the high wear; thus causing a problem of high cost

Method used

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  • Polishing method for inner surface of tubular brittle material and material obtained by the method
  • Polishing method for inner surface of tubular brittle material and material obtained by the method
  • Polishing method for inner surface of tubular brittle material and material obtained by the method

Examples

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Effect test

example 1

[0021] Silicon tetrachloride is vaporized, and the thus vaporized silicon tetrachloride is then subjected to flame hydrolysis in an acidic hydrogen flame, followed by deposition of fine particles of quartz glass on the surrounding area of ​​the rotating substrate. A large-sized porous soot body is obtained according to the OVD method. The thus-prepared porous soot body was placed in an electric furnace, taking into account the refractive index of the glass mandrel and similar conditions, from He and Cl 2 The mixed gas was heated to 1100°C for dehydration, and then transformed into transparent glass by heating to 1600°C in a He atmosphere to produce a cylindrical quartz glass blank. The two ends of the cylindrical quartz glass blank thus produced are cut, and its inside is ground with a vertical honing machine having a cylindrical polishing head as shown in FIG. 2 with an enlarged portion 3 (machine honing grinding), the enlarged portion is evenly distributed around the surfac...

example 2

[0024] Polishing-finishing was performed in the same manner as in Example 1, except that the diamond paper 4 was attached only to the four enlarged portions 3 evenly distributed around the polishing head 4 (machine honing). The maximum roughness Rmax and the centerline average roughness Ra of the inner surface of the obtained quartz glass tube are approximately the same as the data of Example 1; but a spiral scratch is observed, which may be made of ground stone or quartz glass debris As a result, debris gets lodged and scratches the inner surface. Therefore, this result is acceptable only for low quality requirements, and this is not the best mode of implementing the method according to the invention.

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Abstract

An object of the present invention is to provide a polishing method for producing, in a relatively short period of time, a tubular brittle material having an inner surface of high surface precision with a maximum roughness Rmax of 0.1 mum or smaller and a center line average roughness Ra of 0.01 mum or smaller, and to provide a tubular brittle material with high precision using said polishing method. The polishing method according to the invention is characterized by that the inner surface of the tubular material being pre-cut into a tubular shape using a honing machine is further polished with a sheet material having diamond abrasives attached thereon. Also claimed is a tubular brittle material obtained by said polishing method.

Description

technical field [0001] The present invention relates to a polishing method for the inner surface of a tubular brittle material and a tubular brittle material obtained by the polishing method, in particular, it relates to a polishing method for the inner surface of a quartz glass tube for producing an optical fiber having excellent surface accuracy and has a high The inner surface precision of the quartz glass tube. Background technique [0002] Tube-shaped brittle materials, especially high-purity quartz glass tubes, have been used as reaction tubes for the internal vapor deposition method (MCVD method) of optical fiber production, or as sleeves prefabricated by either of the following methods: Modified Chemical Vapor Deposition (MCVD), Axial Vapor Deposition (VAD), and External Vapor Deposition (OVD). When there are irregularities or cracks on the inner surface of the high-purity quartz glass tube used as the prefabricated casing, air bubbles will be generated when the pre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B33/02B24B5/40B24B19/00
CPCB24B5/40B24B33/02B24B19/006
Inventor T·楚穆拉亚M·苏祖基
Owner HERAEUS QUARZGLAS
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