Magnetic microparticle operation controller
A manipulator and particle technology, which is applied to instruments, scientific instruments, sampling, etc., can solve the problems that the structure of the micro-solenoid coil is not compact enough, the particle control device is difficult to be widely used, and the processing technology is complicated, so as to achieve convenient and flexible design and improve the Control sensitivity, simple process effect
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[0013] figure 1 It is a specific embodiment of the present invention. The key structures of the present invention are planar micro-coils and magnetic micro-tips, wherein the planar micro-coils 4 are processed on the back side of a double-sided polished substrate 3-such as a silicon wafer, glass sheet, GaAs sheet-, and the magnetic micro-tips 2 are processed on the substrate. On the front side of the sheet 3 , the magnetic core 1 is located in the center of the planar microcoil 4 and connected to the magnetic microtip 2 through the substrate 3 . The function of the magnetic core 1 is to concentrate the applied electromagnetic field generated by the planar microcoil on the magnetic microtip 2 .
[0014] The processing process of the magnetic particle manipulator of the present invention is as follows: at first, on the back side of the substrate 3, process the welding plate 5 and the lead wire 6 of the planar microcoil 4 by the method of copper electroplating, the welding plate ...
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