Production for aluminium-material X-ray assembled lens

A combination lens and manufacturing method technology, applied in the direction of lens, radiation/particle processing, photo-plate making process exposure device, etc., can solve the problems of large spherical aberration, large absorption of X-ray radiation, etc., achieve small material restrictions and increase light collection aperture , Improve the effect of X-ray radiation transmittance

Inactive Publication Date: 2005-05-11
ZHEJIANG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the device material is Cu material, it has the disadvantage of large absorption of X-ray radiation.
In addition, due to the use of a cylindrical surface, the spherical aberration of the combined lens is relatively large when focusing and imaging

Method used

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  • Production for aluminium-material X-ray assembled lens

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Refer to attached figure 1 , a kind of manufacture method of aluminum material parabolic X-ray compound lens, comprises the preparation of X-ray lithography mask, the preparation of X-ray lithography substrate and the formation of final aluminum material lens; (1) X-ray lithography mask The preparation includes the following steps:

[0029] (A) Spin-coating a layer of polyimide coating on the surface of the silicon substrate through conventional cleaning treatment, baking and curing;

[0030] (B) growing an electroformed cathode film of a copper material on the surface of the solidified sample sheet;

[0031] (C) Coating a layer of AZP4000 photoresist on the surface of the electroformed cathode film, carrying out photoetching, development, and hardening of the above photoresist to form a photoresist pattern structure;

[0032] (D) growing one deck metal thin film on photoresist pattern structure, described metal thin film material is gold, and its thickness is less th...

Embodiment 2

[0044] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a titanium material, and the thickness of the PMMA coating on the surface of the titanium sheet is 1000 microns in the step (1), and all the other steps are the same as in Example 1.

Embodiment 3

[0046] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a nickel material, and the thickness of the PMMA coating on the surface of the titanium sheet is 2000 microns in the step (1), and all the other steps are the same as in Example 1.

[0047] Process tests have been carried out on the above three embodiments, and it can be seen from the test results that they all meet the requirements of the structural shape and size of the X-ray combined lens, and the process test effect of embodiment 2 is the best.

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Abstract

A method for preparing integrated lens includes forming windows on substrate and using it as mask, preparing titanium plate being used as X ray optical etching substrate, using NaOH / H2O2 to carry out surface treatment and forming X ray optical etching substrate; filling silicon rubber into sample structure for curing process filling aluminium material into rubber mould being taken off, separating out mould after curing; including scaled bottom plate, lens main body and air gap on the retained structure.

Description

(1) Technical field [0001] The invention relates to an X-ray microstructure optical device, in particular to a manufacturing process of an X-ray combined lens, which is suitable for the production of an aluminum material parabolic X-ray combined lens. (2) Background technology [0002] X-ray combined lens is a new type of X-ray microstructure optical element suitable for high-energy X-ray band (that is, X-ray radiation energy exceeding 5keV) proposed by A. Snigirev in 1996. The X-ray combination lens has many advantages, such as no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. In particular, it is suitable for occasions where the energy of X-ray radiation exceeds 5keV, so the element has broad application prospects in scientific and technical research. In recent years, research on various X-ray diagnostic techniques based on X-ray combined lenses is ve...

Claims

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Application Information

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IPC IPC(8): G02B3/00G03F7/20G21K1/00
Inventor 乐孜纯梁静秋董文全必胜
Owner ZHEJIANG UNIV OF TECH
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