Plasma processing device and method thereof
A plasma and processing device technology, which is applied in the field of plasma processing devices, can solve problems such as cracks in the dielectric film, peeling of the dielectric film, substrate turnover, etc., and achieve the effect of suppressing abnormal discharge
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0024] Embodiments of the present invention will be described below with reference to the drawings.
[0025] figure 1 It is a plasma etching apparatus for LCD glass substrates which schematically shows the embodiment of this invention. The plasma etching apparatus 1 is configured as a capacitively coupled parallel plate plasma etching apparatus.
[0026] The plasma etching device 1 has a rectangular box-shaped chamber 2 whose surface is made of anodized aluminum. A substrate holding table 3 for holding an LCD glass substrate G as a dielectric substrate to be processed is provided on the bottom of the chamber 2 . The substrate holding table 3 has a holding table main body 4 formed of a conductor such as aluminum, and an insulating member 5 covering the side surfaces and the bottom surface of the holding table main body 4 . When the substrate G is placed, the upper surface of the holding table main body 4 becomes the substrate mounting surface, and the periphery of the substr...
PUM
Property | Measurement | Unit |
---|---|---|
length | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com