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Method for preparing lithium ion solid electrolyte film with high deposition rate

A technology of solid electrolyte and lithium ion, which is applied in the field of preparing nitrided Li3PO4 thin film, which can solve the problems of rough surface, difficulty in the popularization and application of all solid-state thin film lithium ion batteries, poor physical properties of deposited thin film, etc., and achieve high ion conductivity

Inactive Publication Date: 2003-10-08
FUDAN UNIV
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Problems solved by technology

Since the pressure of nitrogen gas in the deposition process is between 1 and 50 Pa, the physical properties of the deposited film are poor and the surface is rough, so it is difficult to popularize and apply it in the preparation of all-solid-state thin-film lithium-ion batteries.
Before the present invention, there was no report on the preparation of lithium phosphorus oxynitrogen by the new technology of pulse laser deposition method combined with nitrogen ion source generator

Method used

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Embodiment 1

[0015] In the present invention, it is prepared by combining the pulse laser deposition method with the nitrogen ion source generator. Thin films deposited by pulsed laser are carried out in a stainless steel reaction chamber. The 532nm visible pulsed laser is obtained by doubling the fundamental frequency generated by a Nd:YAG (Spectra Physics). The laser energy density used for deposition is 4J / cm 2 . The nitrogen ion source generator is generated by an electron cyclotron resonance (ECR) device. The cyclotron resonator operates at 300 watts. The flow of high-purity nitrogen gas (99.99%) into the cyclotron cavity is controlled by a needle valve, and the generated nitrogen plasma freely diffuses into the pulsed laser deposition chamber, and the direction of the diffusion port faces the deposition substrate. Adjust the nitrogen flow to keep the air pressure in the laser reaction chamber at 2×10 -2 Pa. Substrate and LiPO 3 The target distance is 3.5 cm. The temperature o...

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Abstract

Azotized Li3PON4 or simplified as lithium phosphor, oxygen and nitrogen (LiPON) is prepared by combination of the pluse laser deposition method and the azote ion source generator. The method providesfast deposition speed reaching to 0.8-2.0 micron m per hour. The conductivity of Li ion of the lithium, phosphor, oxygen and nitrogen film prepared by using the invented method reaches 2-5X10 to the power -6 s / cm. Combining with V2O5 and MoO3 etc. other electrodes as well as the metal lithium film electrode prepared by heat evaporation, the all-solid state film lithium ion battery can be assembled.

Description

technical field [0001] The invention relates to a method for preparing a lithium ion solid electrolyte film with a high deposition rate, specifically a method for preparing Li nitride 3 PO 4 (referred to as lithium phosphorus oxynitride) thin film method. The prepared film can be applied to all-solid-state thin-film lithium-ion batteries. Background technique [0002] With the miniaturization of microelectronic devices, it is urgent to develop a matching miniaturized and long-life power supply. Compared with other chemical batteries, the all-solid-state rechargeable lithium-ion thin film battery has the characteristics of the largest specific capacity, long charge and discharge life, and good safety performance. The research and development of all-solid-state rechargeable lithium-ion thin film batteries has a wide range of application backgrounds. All-solid-state thin-film lithium-ion batteries can be divided into two categories according to the polymers and inorganic so...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/22
CPCY02P70/50
Inventor 傅正文秦启宗赵胜利刘文元
Owner FUDAN UNIV
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