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Zinc gallium oxide ceramic target material and its preparation method and application

A zinc gallium oxide, ceramic target technology, applied in conductors, electrical components, non-insulated conductors, etc., can solve problems such as difficulties and decreased device performance stability, achieve good performance consistency, strong film-based adhesion, The effect of low production cost

Inactive Publication Date: 2003-04-30
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when preparing thin films on flexible organic substrates, the substrate temperature is generally not allowed to exceed 200°C, so it is difficult to prepare ITO thin films with excellent performance on flexible organic substrates.
At the same time, when the ITO film is applied to the solar cell as a transparent electrode, the In in the film will diffuse into the battery material, which will reduce the performance stability of the device.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Zinc oxide powder with a purity of 99.9% and gallium oxide powder with a purity of 99.9% (accounting for 2.1% of the total mass) are uniformly mixed with each other, and formed by cold pressing at a pressure of 2.50×10 6 N. Sinter at 1560°C to form a block with a density of 96% of the theoretical density, and make a target with a size of 400mm×200mm×6mm. Using this target material, zinc gallium oxide transparent conductive film was deposited on polyester film by radio frequency sputtering deposition method, the thickness of the obtained film was 30nm, and the resistivity was 6.2×10 -4 Ω.cm, 550nm visible light transmittance is 86%.

Embodiment 2

[0023] Zinc oxide powder with a purity of 99.99% and gallium oxide powder with a purity of 99.99% (accounting for 4.6% of the total mass) are uniformly mixed with each other, and formed by cold pressing at a pressure of 2.50×10 6 N. Sinter at 1180°C to form a block with a density of 95% of the theoretical density, and make a target with a size of 400mm×200mm×6mm. Using this target material, the zinc-gallium oxide transparent conductive film was deposited on the glass by DC magnetron sputtering deposition method. The thickness of the obtained film was 30nm and the resistivity was 3.6×10 -4 Ω.cm, 550nm visible light transmittance is 88%.

Embodiment 3

[0025] Zinc oxide powder with a purity of 99.99% and gallium oxide powder with a purity of 99.99% (accounting for 6.8% of the total mass) are uniformly mixed with each other, and formed by cold pressing at a pressure of 2.50×10 6 N. Sintered at 1680°C to form a block with a density of 97% of the theoretical density, and make a target with a size of 400mm×200mm×6mm (length×width×height). Three targets are bonded to form a production line size target of 1200mm×200mm×6mm. Using this target, the zinc gallium oxide transparent conductive film is deposited on the glass by DC magnetron sputtering deposition method. The thickness of the obtained film is 110nm, the resistivity is 4.43×10 -4 Ω.cm, the visible light transmittance of 550nm is 87%.

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Abstract

A zinc gallium oxide ceramic target used for sputtering and electrically conductive transparent film is prepared through mixing zinc oxide powder with gallium oxide powder, cold die pressing and sintering. Its advantages are simple process, low cost and high stability of performance. The said film has excellent photoelectric performance, so it can be used as the electrode of solar cell.

Description

technical field [0001] The invention belongs to the technical field of optoelectronic materials, in particular to a zinc-gallium oxide ceramic target material and its preparation technology and application. Background technique [0002] Transparent Conductive Oxide (TCO) thin films mainly include oxides of In, Sn, Sb, Zn and Cd and their composite multi-element oxide thin film materials. Low optoelectronic properties, transparent conductive oxide thin films are widely used because of their properties of being both transparent and conductive. At present, the main application fields of TCO films are: (1) flat panel display, such as liquid crystal display, plasma display, field emission display, electroluminescence display, etc.; The selective permeability (that is, the transmittance of visible light and the reflectivity of infrared light) can be used for heat shielding of architectural glass windows to save energy consumption; (3) Transparent surface heaters, such as in autom...

Claims

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Application Information

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IPC IPC(8): C04B35/453C04B35/622H01B5/00
Inventor 庄大明张弓方玲侯亚奇杨波赵方红
Owner TSINGHUA UNIV
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