Nickel titanium memory alloy and piezoelectric ceramic hetero three step compounding technology
A nickel-titanium memory alloy, piezoelectric ceramic technology, applied in metal material coating process, piezoelectric/electrostrictive/magnetostrictive device, piezoelectric/electrostrictive device manufacturing/assembly, etc. Effectively solve the problems of physical and chemical compatibility of heterointerface structure and complex process
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[0014] Embodiment: a kind of nickel-titanium memory alloy and piezoelectric ceramics heterogeneous three-step composite process (see figure), it is characterized in that it is made up of following three steps:
[0015] The first step: surface treatment of nickel-titanium (NiTi) thin film substrate, the surface treatment of nickel-titanium (NiTi) thin film substrate is chemical treatment, the surface is cleaned, oil stains and oxide scales are removed and a surface with suitable roughness is formed ;
[0016] The above-mentioned surface treatment of the nickel-titanium sheet substrate adopts a chemical treatment method that can be pickling, and the pickling solution is a solution of hydrofluoric acid, nitric acid, and water in a volume ratio of 3:3:4.
[0017] The second step: chemically deposit piezoelectric ceramic lead zirconate titanate (PZT) film on nickel-titanium (NiTi) substrate, that is, obtain piezoelectric ceramic lead zirconate titanate (PZT) film on nickel-titanium...
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