Manufacturing method of semiconductor structure and semiconductor structure
A manufacturing method and semiconductor technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, transistors, etc., can solve problems affecting the performance of transistors and access performance of DRAM devices, so as to improve switching speed, reduce quantum tunneling effect, The effect of improving stability
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0078] During the actual research process, the inventors of the present application found that when using HKMG technology to manufacture transistors, the heat treatment process and heat treatment annealing process are generally completed in a heat treatment furnace. An amorphous silicon layer is formed on the surface of the layer, and finally a metal gate is formed. Since the polysilicon sacrificial layer grown through the furnace tube requires a long-term high-temperature growth process, this process will generate a large thermal budget, resulting in a decrease in the amount of heat reserved for the work function adjustment process, resulting in the work function adjustment process. , the work function diffusion particles cannot obtain enough energy to diffuse to the predetermined layer position, so that the work function adjustment process cannot be completed. Moreover, in the process of growing the polysilicon sacrificial layer in the furnace tube, the high temperature proc...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com