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Structure with conductive pattern and method for manufacturing same

A manufacturing method and structure technology, which can be used in cable/conductor manufacturing, printed circuit manufacturing, radiation element structure, etc., can solve the problems of requiring photoresist materials, complexity, and many processes, and achieve a simple interlayer The effect of tightness

Pending Publication Date: 2022-05-06
ASAHI KASEI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing methods have the disadvantages of many steps, complicated procedures, and the need for photoresist materials.

Method used

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  • Structure with conductive pattern and method for manufacturing same
  • Structure with conductive pattern and method for manufacturing same
  • Structure with conductive pattern and method for manufacturing same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0234] Dissolve 806 g of copper acetate (II) monohydrate (manufactured by Kanto Chemical Co., Ltd.) in a mixed solvent of 7560 g of distilled water (manufactured by Kyoei Pharmaceutical Co., Ltd.) and 3494 g of 1,2-propanediol (manufactured by Kanto Chemical Co., Ltd.). The thermostat keeps the liquid temperature at -5°C. Add 235 g of hydrazine monohydrate (manufactured by Tokyo Chemical Industry Co., Ltd.) over 20 minutes, stir in a nitrogen atmosphere for 30 minutes, then set the liquid temperature to 25° C. with an external thermostat, and stir in a nitrogen atmosphere for 90 minutes. After stirring, the supernatant and the precipitate were separated by centrifugation. 13.7 g of Disper BYK-145 (manufactured by BYK Chemicals, a phosphoric acid group-containing organic compound) (dispersant content 4 g) and 907 g of ethanol (manufactured by Kanto Chemical Co., Ltd.) were added to 390 g of the obtained precipitate, and the mixture was used in a nitrogen atmosphere. Dispersion...

Embodiment 2

[0245] The dispersion obtained in the same manner as in Example 1 was applied to a polyimide film (manufactured by Toray-DuPont, KAPTON500H, thickness 125 μm) by spin coating, and kept in an oven at 90° C. for 2 hours. The solvent in the film evaporated, and Sample 2 was obtained. The coating film thickness of the obtained sample 2 was 1000 nm.

[0246] Using a Galvano scanner, irradiate laser light (pulse wave oscillation, 532 nm) to the coating film of sample 2 while moving the focus position at a maximum speed of 4500 mm / min, thereby obtaining a desired size of 0.5 mm × 5 mm. Conductive pattern area (copper-containing film). The coating film remained in the area not irradiated with laser light.

[0247] The cross-section of copper in the conductive pattern region was observed by SEM. As a result, the thickness was 0.5 μm, and the porosity was 40% by volume in the region on the first main surface side. In addition, the resistance value of the conductive pattern region was...

Embodiment 3

[0252] The dispersion obtained in the same manner as in Example 1 was applied to a polyimide film (manufactured by Toray-DuPont, KAPTON500H, thickness 125 μm) by spin coating, and kept in an oven at 90° C. for 2 hours. The solvent in the film evaporated, and Sample 3 was obtained. The coating film thickness of the obtained sample 3 was 1000 nm.

[0253] Using a Galvano scanner, irradiate laser light (pulse wave oscillation, 532 nm) to the coating film of sample 3 while moving the focus position at a maximum speed of 1200 mm / min, thereby obtaining a desired size of 0.5 mm × 5 mm. Conductive pattern area (copper-containing film). The coating film remained in the area not irradiated with laser light.

[0254] The cross-section of copper in the conductive pattern region was observed by SEM, and the thickness was 0.5 μm, and the porosity was 11.7% by volume in the region on the first main surface side. In addition, the resistance value of the conductive pattern region was 30 μΩc...

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Abstract

Provided are: a structure with a conductive pattern, which can be obtained by a simple manufacturing process and has good interlayer adhesion; and a method for manufacturing the structure. One embodiment of the present invention provides a structure with a conductive pattern, which is provided with a base material and a conductive layer that is arranged on the surface of the base material and contains copper, and wherein: when the main surface of the conductive layer on the side facing the base material is a first main surface and the main surface on the opposite side from the first main surface is a second main surface, the first main surface and the second main surface are opposite to each other; the conductive layer has a porosity of 0.01% by volume or more and 50% by volume or less in a first main surface-side region extending from the first main surface to a depth of 100 nm in the thickness direction of the conductive layer, and has a porosity of 10% by volume or less in a second main surface-side region extending from the second main surface to a depth of 100 nm in the thickness direction of the conductive layer.

Description

technical field [0001] The present invention relates to a structure with a conductive pattern and a manufacturing method thereof. Background technique [0002] The circuit board has a structure in which conductive wiring is provided on the board. The manufacturing method of a circuit board is generally as follows. First, a photoresist is applied to a substrate bonded with a metal foil. Next, the photoresist is exposed and developed to obtain a desired circuit pattern in the shape of a bottom plate. Afterwards, the portion of the metal foil not covered by the photoresist is removed by chemical etching to form a pattern. Thereby, a high-performance circuit board can be manufactured. However, the existing methods have disadvantages such as a large number of steps, complicated procedures, and the need for photoresist materials. [0003] In contrast, the method of directly printing a desired wiring pattern on a substrate using a dispersion in which fine particles selected fr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05K1/09H05K3/18H05K3/22H01B5/14H01B13/00
CPCH05K1/092H05K3/18H05K3/227H01B5/14H01B13/00C23C18/40H01Q1/526C23C18/405C23C18/1651C23C18/143C23C18/1648C23C18/1608C23C18/08C23C18/1879C23C18/206C09D11/037C09D11/52H05K3/105H05K2203/107H05K2203/121H05K3/244H05K2201/0209C25D3/38H05K3/384C23C18/14C23C18/18H01Q1/38C23C18/165C23C18/1875H05K1/0237H05K1/09H05K3/10
Inventor 小园智子汤本徹
Owner ASAHI KASEI KK
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