Lead-free nano composite columnar array structure film with high energy storage density and wide working temperature and preparation method of lead-free nano composite columnar array structure film
A technology with wide operating temperature and high energy storage density, applied in the manufacture of hybrid/electric double layer capacitors, hybrid capacitor electrodes, hybrid capacitor electrolytes, etc., can solve the problems of increased dielectric loss, reduced energy storage efficiency, and reduced breakdown. , to achieve the effects of increasing the working temperature, increasing the breakdown field strength, and increasing the energy storage density
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Embodiment 1
[0035] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:
[0036] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.06HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 4N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100°C.
[0037] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.
[0038] Step 3. Ventilate and heat up: Infuse 200 mbar of argon gas and oxygen gas mixture with a volume ratio of 1 / 1, then raise the te...
Embodiment 2
[0044] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:
[0045] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.18HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 5N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100 °C.
[0046] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.
[0047] Step 3. Ventilation and temperature rise: 200 mbar of the mixed gas of argon and oxygen with a volume ratio of 1 / 1 was introduc...
Embodiment 3
[0053] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:
[0054] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.32HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 5N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100 °C.
[0055] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.
[0056] Step 3. Ventilate and heat up: inject 200 mbar of argon-oxygen mixed gas with a volume ratio of 1 / 1, then raise the temperature...
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Abstract
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Application Information
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