Lead-free nano composite columnar array structure film with high energy storage density and wide working temperature and preparation method of lead-free nano composite columnar array structure film

A technology with wide operating temperature and high energy storage density, applied in the manufacture of hybrid/electric double layer capacitors, hybrid capacitor electrodes, hybrid capacitor electrolytes, etc., can solve the problems of increased dielectric loss, reduced energy storage efficiency, and reduced breakdown. , to achieve the effects of increasing the working temperature, increasing the breakdown field strength, and increasing the energy storage density

Pending Publication Date: 2022-04-26
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] As we all know, at high temperature, the main reasons for device failure are: the breakdown is reduced, and high voltage cannot be applied; the remnant polarization is greatly increased, and the energy storage efficiency is reduced; the dielectric loss is greatly increased.

Method used

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  • Lead-free nano composite columnar array structure film with high energy storage density and wide working temperature and preparation method of lead-free nano composite columnar array structure film
  • Lead-free nano composite columnar array structure film with high energy storage density and wide working temperature and preparation method of lead-free nano composite columnar array structure film

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Experimental program
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Effect test

Embodiment 1

[0035] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:

[0036] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.06HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 4N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100°C.

[0037] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.

[0038] Step 3. Ventilate and heat up: Infuse 200 mbar of argon gas and oxygen gas mixture with a volume ratio of 1 / 1, then raise the te...

Embodiment 2

[0044] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:

[0045] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.18HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 5N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100 °C.

[0046] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.

[0047] Step 3. Ventilation and temperature rise: 200 mbar of the mixed gas of argon and oxygen with a volume ratio of 1 / 1 was introduc...

Embodiment 3

[0053] The lead-free nanocomposite columnar array film with high energy storage density and wide working temperature in this embodiment includes the following steps:

[0054] Step 1. Target preparation: for growing BaHf 0.17 Ti 0.83 o 3 -0.32HfO 2 The ceramic target material of the lead-free nanocomposite columnar array structure film adopts BaCO with a purity level of 5N 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by traditional ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100 °C.

[0055] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating platform, and the vacuum degree in the deposition chamber is less than 1×10 by using a mechanical pump and a molecular pump. -5 mbar.

[0056] Step 3. Ventilate and heat up: inject 200 mbar of argon-oxygen mixed gas with a volume ratio of 1 / 1, then raise the temperature...

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Abstract

The invention discloses a high-energy-storage-density wide-working-temperature lead-free nano composite columnar array structure film and a preparation method thereof.The high-energy-storage-density wide-working-temperature lead-free nano composite columnar array structure film comprises an Nb: SrTiO3 substrate and a lead-free nano composite columnar array structure film arranged on the Nb: SrTiO3 substrate; the lead-free nano composite thin film with the columnar array structure is a BaHf < 0.17 > Ti < 0.8 > O < 3-x > HfO2 thin film, wherein x is more than or equal to 0.06 and less than or equal to 0.32. The preparation method comprises the following steps: preparing a BaHf < 0.17 > Ti < 0.8 > O < 3-x > HfO2 film on the surface of the Nb: SrTiO3 substrate by using a ceramic target material of a BaHf < x > Ti < 1-x > O3 film in a magnetron sputtering manner, and then annealing to obtain the lead-free nano composite columnar array structure film with high energy storage density and wide working temperature. The lead-free nano composite columnar array structure film with high energy storage density and wide working temperature has the characteristics of high energy storage density and wide temperature range.

Description

technical field [0001] The invention relates to the field of energy storage thin film materials, in particular to a lead-free nanocomposite columnar array structure thin film with high energy storage density and wide working temperature and a preparation method thereof. Background technique [0002] With the popularization of new energy electric vehicles and the rise of clean energy such as wind power and solar power. The problem that more and more devices need to solve is the storage of energy. Due to its high power density, dielectric capacitors are widely used in many fields such as hybrid electric vehicles, electromagnetic guns, and lasers. However, compared with energy storage elements such as lithium-ion batteries, fuel cells, and supercapacitors, dielectric capacitors have a lower energy storage density, which greatly limits their wide application. In addition, the lower working temperature is also a technical bottleneck that needs to be solved urgently. The curren...

Claims

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Application Information

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IPC IPC(8): H01G11/56H01G11/30H01G11/86
CPCH01G11/56H01G11/30H01G11/86
Inventor 刘明马春蕊陆锐
Owner XI AN JIAOTONG UNIV
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