Titanium-copper alloy etching solution and etching method

Abstract

The invention discloses a titanium-copper alloy etching solution and an etching method. The etching solution comprises inorganic acid, copper salt and a corrosion inhibitor. The inorganic acid is used for providing hydrogen ions in an acidic environment, and the acidic environment is beneficial to excitation of oxidability of copper ions in the copper salt, so that the copper ions react with the titanium-copper alloy, and etching of the titanium-copper alloy is achieved. After the copper salt is dissolved, copper ions have strong oxidizing property in an acid environment and can react with the titanium-copper alloy, so that etching of the titanium-copper alloy is realized. The corrosion inhibitor is added into the etching solution, the corrosion inhibitor can be dissolved in the etching solution and has good affinity with the titanium-copper alloy, the corrosion inhibitor can be attached to the side wall of the titanium-copper alloy in the etching process, contact between the side wall and the etching solution is reduced, then lateral erosion is reduced, and the etching precision is improved.

Description

technical field [0001] The invention relates to the technical field of circuit etching, in particular to a titanium-copper alloy etching solution and an etching method. Background technique [0002] The micro-actuation structure is used in high-precision imaging equipment such as mobile phone cameras, car cameras, electronic imaging microscopes, and flexible precision devices. axis) for small size (micrometer to millimeter) position shift / restoration for anti-shake and zoom. [0003] The micro-actuating structure usually includes a driving device and a flexure device. The driving device is used to provide a driving force for driving the lens to move, and the flexure device is used to provide a carrier for the lens to move. The driving device drives the lens to move by driving the flexure device to move. The deflection device is also used to transmit sensing signals so that the processor can know the position of the lens and perform accurate compensation. Therefore, the fle...

AI Technical Summary

Problems solved by technology

Titanium-copper alloy has the advantages of high strength, low elastic modulus, and good recovery, so it can meet the requirements of the support layer of the flexure device (it can realize small-scale displacement and return to the original state), but at the same time, its chemical corrosion resistance making it difficult to process

When using the existing etching solution to etch titanium-copper alloy, there are usually problems such as large side erosion, small etching factor and low etching precision

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