Composite film sensor for measuring heat flux density and pressure and preparation method thereof

Abstract

The invention discloses a composite film sensor for measuring heat flux and pressure and a preparation method thereof. The composite film sensor comprises a capacitive film pressure sensing part and a heat flux sensing part, the capacitive thin film pressure sensing part comprises a doped silicon substrate, a dielectric insulating layer, a polycrystalline silicon layer and a pressure-sensitive substrate are sequentially arranged below the doped silicon substrate from top to bottom, a vacuum sealing cavity is formed between the pressure-sensitive substrate and the doped silicon substrate, a capacitor lower polar plate is arranged on the pressure-sensitive substrate and located in the vacuum sealing cavity, and the dielectric insulating layer, the polycrystalline silicon layer and the pressure-sensitive substrate are arranged in the vacuum sealing cavity. The doped silicon substrate right above the vacuum sealing cavity is a capacitor upper polar plate; the heat flow density sensing part comprises a thermopile layer substrate, a thermopile layer and a thermal resistance layer; the thermal resistance layer comprises a thermal resistance cold end and a thermal resistance layer hot end, and the thermopile layer comprises a first thermocouple and a second thermocouple which are sequentially connected and arranged at an interval. Copper and constantan are adopted as thermocouple electrode materials, the materials are easy to obtain, the production cost is low, and the method is suitable for large-scale industrial production.

Description

technical field [0001] The invention belongs to the technical field of thin film sensors, and in particular relates to a composite thin film sensor for measuring heat flux density and pressure and a preparation method thereof. Background technique [0002] Heat flow and pressure are commonly used parameters for various equipment in different industries, such as various industrial furnaces, heat transmission pipelines, aerospace, etc., all of which need to detect heat loss and pressure in local areas of their equipment. During the working process of industrial equipment, the heat flow and pressure at the stagnation point of some important components are particularly important parameters. The heat flow and pressure at the stagnation point have different response times according to different measurement methods. During the process, the heat flow and pressure at the stagnation point need to be measured multiple times and adjusted continuously, especially for the irregular surfac...

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Problems solved by technology

The heat flow and pressure at the stagnation point have different response times according to different measurement methods. During the process, the heat flow and pressure at the stagnation point need to be measured multiple times and adjusted continuously, especially for the irregular surface of the measured object. One probe is installed on the bracket in one measurement, and only one of the parameters can be measured

Moreover, when converting the measurement parameters, it takes a lot of time to disassemble, change and install the probe, often the measurement time is much shorter than the time to replace the probe, and the simultaneous output of the two parameters cannot be guaranteed, and the efficiency is relatively low

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