Broadband high-reflection all-dielectric film ultraviolet reflector for ultraviolet curing and preparation method of broadband high-reflection all-dielectric film ultraviolet reflector

Abstract

The invention belongs to the field of ultraviolet reflectors, and particularly relates to a broadband high-reflection all-dielectric film ultraviolet reflector for ultraviolet curing and a preparation method of the broadband high-reflection all-dielectric film ultraviolet reflector. The reflector includes a glass substrate and a reflecting film. The reflecting film is formed by sequentially and alternately depositing high-refractive-index HfO2 film layers and low-refractive-index SiO2 film layers, the first deposited layer and the last deposited layer are the high-refractive-index HfO2 film layers, and the film system structure of the high-refractive-index HfO2 film layers is S|(HL)<n>H|A; wherein S is a glass substrate; H is a high-refractive-index film layer; L is a low-refractive-index film layer; n is the number of membrane stack cycles; A is air. The preparation method comprises the steps of substrate cleaning, high-energy ion bombardment, multilayer film plating and aging treatment. The dielectric film is high in film layer density, free of film layer falling, stable in spectral performance and long in replacement period, multi-layer film scattering can be reduced, the ultraviolet light energy utilization rate of an ultraviolet light source from short waves to long waves is increased, and the ultraviolet curing quality is guaranteed.

Description

technical field [0001] The invention belongs to the field of ultraviolet reflectors, in particular to a broadband high-reflection all-dielectric film ultraviolet reflector for ultraviolet light curing and a preparation method thereof. Background technique [0002] UV curing technology has the advantages of high efficiency, energy saving, environmental protection, and economy, and is widely used in various industries such as optical fiber and cable, printed circuit boards, home appliances, panel industry, automobile industry, printing and packaging, etc. [0003] The UV reflector is an important key component of the UV curing system. Its function is to collect and reflect the ultraviolet light emitted by the UV light source, effectively increase the UV irradiation intensity of the working surface of the UV curing system, and then increase the curing rate. The technical indicators such as the reflectivity, reflection bandwidth, and film environmental adaptability of the reflec...

AI Technical Summary

Problems solved by technology

[0004] The current general-purpose UV reflective film is an aluminum film plus a dielectric film protective layer, but the absorption and scattering of the aluminum film are serious, and the reflectivity is not high

The aluminum film is totally reflected in the ultraviolet to infrared band, and the near-infrared light that is harmful to ultraviolet curing is also reflected to the working surface, affecting the curing effect

Moreover, the mechanical strength of the aluminum film is not high, it is easy to damage the film layer during daily use and maintenance, and the service life is relatively short, which increases the production cost; and the reflection band of the commonly used ultraviolet dielectric film reflective film is mainly in the near ultraviolet band, and there is no short-term UV coverage to

At present, there is no method for preparing a dielectric film mirror that can take into account the short-wave to long-wave ultraviolet band to achieve broadband high reflection

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