Copper-containing composite coating and preparation method
A technology of composite coating and copper content, which is applied in the direction of coating, metal material coating process, ion implantation plating, etc., can solve the problems of increasing the cost of coating preparation and the inability to accurately control the content of coating elements, so as to achieve the goal of suppressing The effect of surface endothelialization, simple controllability, and process stability
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0037] A copper-titanium composite coating is deposited on the surface of a medical titanium alloy by magnetron sputtering.
[0038] Step 1, polishing and drying the medical titanium surface.
[0039] Step 2, put the medical titanium sheet into the vacuum chamber and perform reverse sputtering. The pressure in the vacuum chamber of the reverse sputtering is less than 6×10 -4 Pa, adjust the flow rate of argon gas so that the air pressure in the vacuum chamber reaches 2Pa, at this time, adjust the bias power supply to -700V, and make the argon ions perform reverse sputtering to clean the surface of the substrate, and the cleaning time is 10 minutes.
[0040] Step 3, put a titanium target in the vacuum chamber, place a copper sheet with a diameter of 10 mm and a thickness of 2 mm on the titanium target in a uniform manner, and remove oxide impurities on the surface of the target by pre-sputtering. When the air pressure in the vacuum chamber reaches 6×10 - 4Pa, open the baffle ...
Embodiment 2
[0045] A copper-titanium composite coating is deposited on the surface of a medical titanium alloy by magnetron sputtering.
[0046] See embodiment one for step one and step two.
[0047] Step 3, put a titanium target in the vacuum chamber, place a copper sheet with a diameter of 10 mm and a thickness of 2 mm on the titanium target in a uniform manner, and remove oxide impurities on the surface of the target by pre-sputtering. When the air pressure in the vacuum chamber reaches 6×10-4Pa, open the baffle between the target and the substrate, adjust the flow of argon gas so that the air pressure in the vacuum chamber reaches about 3Pa, and start sputtering. After the ignition in the vacuum chamber is successful, adjust Argon gas flow, so that the sputtering pressure is 0.8Pa, close the baffle between the target and the substrate, adjust the deposition bias to 0V, and the sputtering power to 200W, pre-sputter the composite target to remove the target Surface oxide impurities, re...
Embodiment 3
[0052] A copper-titanium composite coating is deposited on the surface of a medical titanium alloy by magnetron sputtering.
[0053] See embodiment one for step one and step two.
[0054] Step 3, put a titanium target in the vacuum chamber, place a copper sheet with a diameter of 10 mm and a thickness of 2 mm on the titanium target in a uniform manner, and remove oxide impurities on the surface of the target by pre-sputtering. When the air pressure in the vacuum chamber reaches 6×10 - 4 Pa, open the baffle between the target and the substrate, adjust the argon gas flow rate to make the pressure in the vacuum chamber reach about 3Pa, and start sputtering. 0.4Pa, close the baffle between the target and the substrate, adjust the deposition bias to 0V, and the sputtering power to 100W, pre-sputter the composite target to remove oxide impurities on the target surface, and the removal time is 10 minutes.
[0055] Step 4: Open the baffle between the target and the substrate, and ...
PUM
Property | Measurement | Unit |
---|---|---|
diameter | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com