Light capturing module of photoelectric detector and photoelectric detector

A photodetector and light capture technology, applied in the field of photodetectors, can solve problems such as device performance difficulties, and achieve the effects of improving light harvesting ability, reducing dependence, and increasing output photocurrent

Pending Publication Date: 2022-01-11
WENZHOU UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The planar microstructure limits the further increase of absorbed light energy; thus, it becomes relatively difficult to further improve the performance of the device

Method used

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  • Light capturing module of photoelectric detector and photoelectric detector
  • Light capturing module of photoelectric detector and photoelectric detector
  • Light capturing module of photoelectric detector and photoelectric detector

Examples

Experimental program
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preparation example Construction

[0031] In some embodiments of the invention, figure 1 Shown, its preparation method comprises the following steps:

[0032] (1) Prepare a rigid template with a depressed micropillar array on the rigid template;

[0033] (2) preparing a flexible and adhesive polydimethylsiloxane film on the surface of the rigid template prepared in step (1) having a depressed micropillar array;

[0034] (3) Place the elastic ball on the flexible and adhesive polydimethylsiloxane film of step (2), apply external pressure to the elastic ball, extrude the elastic ball into a flat shape, and make the flat part of the ball Contact with the polydimethylsiloxane adhesive film for further curing; then the external pressure is removed, the flattened sphere recovers, the bonded part of the polydimethylsiloxane film is deformed into a spherical dome, and the convex micropillar array is transferred to the spherical surface, thereby preparing a curved polydimethylsiloxane film with a convex micropillar ar...

Embodiment 1

[0049] 1. Preparation of planar hexagonal concave MLAs rigid epoxy template

[0050] A microcolumn array structure of photoresist was fabricated on chrome-plated molten glass by maskless lithography. In the experiment, the wavelength of the laser light source is 406nm, the exposure power is 30mw, and the defocus is set to 4μm. The hexagonal photoresist microcolumn array was prepared by photolithography. In order to prepare the hexagonal convex micropillar array, the photoresist micropillar array was placed on a baking table at 135°C for 30s. Melting solid microcolumns into liquid microdroplets. All droplets are spherical due to surface tension. After cooling to room temperature, the droplets condense into a solid spherical dome, resulting in a hexagonal convex curved microlens array and micropillar array template. For ease of separation, the curved microlens array template was sequentially deposited with a 5-nm-thick vacuum silicone oil (simethicone) and a 30-nm-thick alum...

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Abstract

The invention belongs to a photoelectric detector technology, and particularly relates to a light capturing module of a photoelectric detector and the photoelectric detector. The light capturing module is provided with a plane bottom, the upper surface of the light capturing module is a curved surface, the curved surface is provided with a convex micro-column array, and the unique structural characteristic of the light capturing module can effectively reduce the dependence of surface reflection and projection area on the incident direction, so that the lighting capability of the light capturing module is remarkably improved. The output light current of the photoelectric detector with the light capturing module can be obviously improved, and the light capturing module can be used for developing a high-performance photoelectric detector for brightness induction.

Description

technical field [0001] The invention belongs to the technology of photodetectors, and in particular relates to a light capture module of a photodetector and a photodetector. Background technique [0002] One of the most commonly used sensors is the photodetector, which precisely converts incident photons into charge carriers. Therefore, the light-gathering capability is one of the key indicators for evaluating the performance of photodetectors. In this regard, various microstructures including nanocones, nanopores, micro / nanocones, nanowires, nanorods, which effectively enhance the Omnidirectional light-harvesting capabilities of optoelectronic devices. Although these micro / nanostructures significantly reduce the omnidirectional reflection loss and improve the performance of photodetectors, the projected area of ​​the typical large planar structure morphology has a significant relationship with the incident direction. With the increase of the incident angle, The photocurr...

Claims

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Application Information

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IPC IPC(8): H01L31/0232H01L31/08G02B6/42
CPCH01L31/0232H01L31/08G02B6/4286
Inventor 吴欣学方朝龙张耀举
Owner WENZHOU UNIVERSITY
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