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A kind of electronic grade nitric acid production process

A production process and electronic-grade technology, applied in the field of electronic-grade nitric acid production technology, can solve problems such as poor nitric acid preparation process, and achieve the effects of avoiding excessive corrosion, improving service life, and avoiding violent reactions

Active Publication Date: 2022-07-29
联仕新材料(苏州)股份有限公司
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AI Technical Summary

Problems solved by technology

[0005] The purpose of the invention is to solve the poor problem of nitric acid preparation technology in the prior art, and a kind of electronic grade nitric acid production technology proposed

Method used

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  • A kind of electronic grade nitric acid production process
  • A kind of electronic grade nitric acid production process
  • A kind of electronic grade nitric acid production process

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Experimental program
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Effect test

Embodiment

[0033] refer to Figure 1-3 , a kind of electronic grade nitric acid production technology, mainly comprises the following processing steps:

[0034] S1. Assembly and cleaning of the equipment: connect the intake pipe of the vortex tube 12 to the external air compressor, and connect the external air compressor to the air purifier to ensure that the air entering the vortex tube 12 is purified dust-free air. The use of dust-free air to replace the commonly used high-purity nitrogen can greatly reduce the processing cost and ensure that it will not cause pollution to subsequent processing; the interior of the heating jacket 5 is filled with water to clean the interior of the heating jacket 5 to ensure that the interior of the heating jacket 5 is clean, thereby reducing subsequent distillation impurities;

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Abstract

The invention discloses an electronic-grade nitric acid production process, which mainly includes the following processing steps: assembly and cleaning of equipment, maintenance of equipment and injection of basic materials, dilution of concentrated nitric acid, preliminary whitening after dilution, preliminary distillation, and discharge of impurities With cyclic distillation and collection of finished products, the processing equipment used in the above-mentioned electronic-grade nitric acid production process includes a distillation column, a cooling box and a vortex tube, the bottom of the distillation column is fixed with a plurality of supports, and the upper end of the distillation column is inserted through. There are pure water pipes and acid adding pipes, a premixing sleeve is fixed on the inner top of the distillation column, and a transposition premixing mechanism is arranged inside the premixing sleeve. The advantage is that the white-blown exhaust gas will be discharged from the open transfer pipe, and then transferred to the insulation pipe, and then fully contact and react with the lye in the insulation pipe, so as to realize the absorption and purification of nitrogen dioxide and ensure the cleanliness of the exhaust gas. Harmless, while neutralizing the exothermic reaction to achieve preheating of dilute nitric acid.

Description

technical field [0001] The invention relates to the technical field of electronic-grade chemical processing, in particular to an electronic-grade nitric acid production process. Background technique [0002] Nitric acid is one of the common inorganic strong acids, which plays a great role in etching in semiconductor, flat panel display and photovoltaic industries. [0003] The preparation process of ultra-pure nitric acid mainly includes sub-boiling distillation method, continuous rectification method, etc. At present, the most widely used is to use industrial concentrated nitric acid with a concentration of more than 95% to obtain a nitric acid product with a concentration of about 95% after rectification, and then use ultra-pure nitric acid. The pure water is diluted to the required concentration of nitric acid of about 70%, and the electronic grade nitric acid can be obtained after rectifying the raw material again. [0004] During the dilution process, a large amount of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B21/46B01D3/00B01D3/42
CPCC01B21/46B01D3/00B01D3/42
Inventor 张晨良
Owner 联仕新材料(苏州)股份有限公司
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