Helium ionization detector and preparation method thereof

Abstract

The invention provides a helium ionization detector and a preparation method thereof. The helium ionization detector comprises a substrate, an excitation electrode pair, gas inlet pipes, a bias electrode and a collection electrode; a cavity is formed in the substrate, the cavity comprises an excitation electrode channel, an air inlet channel and an air outlet channel, the excitation electrode channel and the air outlet channel are communicated to form a first intersection area, and the air inlet channel and the air outlet channel are communicated to form a second intersection area; an excitation electrode region of the excitation electrode pair is positioned in the first intersection area; the gas inlet pipes are a first gas inlet pipe and a second gas inlet pipe which have the same morphology and are oppositely arranged, and can provide auxiliary carrier gas and sample carrier gas with the same pressure intensity for the second intersection area; the bias electrode and the collection electrode are located in the air outlet channel and arranged on the outer side of the second intersection area away from the first intersection area. According to the invention, a high-pressure quasi-zero flow velocity region can be formed in the cavity, helium plasma excitation is facilitated, the helium flow velocity in the area is extremely low, helium plasma groups can be stabilized, and then baseline noise can be reduced.

Description

technical field [0001] The invention relates to the field of micro-electromechanical systems, in particular to a helium ionization detector and a preparation method thereof. Background technique [0002] The gas chromatographic detector is one of the core devices of the gas chromatographic system, and its main function is to detect the separated samples. With the development and application of chromatographic column miniaturization, some traditional gas chromatography detectors have also begun to develop towards miniaturization. Due to the wide range of applications of gas chromatography technology, involving various fields such as petrochemical industry, environmental monitoring and medical research, there are many kinds of gases to be detected. Therefore, an ideal gas chromatography detector should have the characteristics of strong versatility and high sensitivity. [0003] Traditional gas chromatography detectors such as Thermal Conductivity Cell Detector (TCD) have goo...

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Problems solved by technology

[0006] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a helium ionization detector and a preparation method thereof, which are used to solve the problem of baseline in the helium ionization detector due to the jitter of plasma radicals in the prior art. The problem of too much noise

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