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High-entropy alloy nitride cutter coating and preparation method thereof

A high-entropy alloy and nitride technology, applied in the field of metal coating, can solve problems such as inability to meet industrial needs, and achieve the effects of low cost, high hardness and uniform composition

Active Publication Date: 2021-08-27
XIAN TECH UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, with the further development of science and technology, traditional tool coatings can no longer meet the needs of industry, and higher requirements are placed on the hardness and wear resistance of tool coatings.

Method used

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  • High-entropy alloy nitride cutter coating and preparation method thereof
  • High-entropy alloy nitride cutter coating and preparation method thereof

Examples

Experimental program
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Effect test

preparation example Construction

[0032] The invention discloses a preparation method of a high-entropy alloy nitride tool coating, which comprises the following steps:

[0033] The tool substrate is degreased and cleaned in sequence; the AlTiVNbCr high-entropy alloy target and B target are used as the sputtering source, and the mixed gas of argon and nitrogen is used as the working gas, and the combination of radio frequency magnetron sputtering and DC magnetron sputtering is adopted. The way to deposit (AlTiVNbCr) BN high-entropy alloy nitride coating on the cleaned tool substrate; wherein, during the deposition process, the temperature of the tool substrate is 350-450°C, the bias voltage of the tool substrate is 150-250V, and the workpiece holder The rotation speed is 5r / min, the base distance of the target is 65mm, the flow rate of argon gas is 6-7sccm, the flow rate of nitrogen gas is 1-2sccm, the AlTiVNbCr high-entropy alloy target is connected to the RF power supply, the power of the AlTiVNbCr high-entro...

Embodiment 1

[0045] Select silicon wafers and high-speed steel tools as substrates, and deposit (AlTiVNbCr) BN high-entropy alloy nitride coatings on silicon wafers and high-speed steel tool substrates. The specific steps are as follows:

[0046] Put the high-speed steel tool base into a degreasing solution with a concentration of 5%, and perform ultrasonic degreasing treatment at 50°C for 20 minutes; rinse the high-speed steel tool base after degreasing treatment with flowing deionized water, and then clean the silicon wafer and The finished high-speed steel cutter substrate was put into absolute ethanol and ultrasonically cleaned at room temperature for 3 times, each time for 15 minutes. After cleaning, the sample was blown dry with an air gun of an air compressor. Ultrasonic cleaning adopts KQ2200DE ultrasonic cleaning machine.

[0047] Send the cleaned silicon wafer and high-speed steel tool substrate into a vacuum chamber equipped with AlTiVNbCr high-entropy alloy targets and B target...

Embodiment 2

[0051] The difference between this embodiment and Embodiment 1 is the magnetron sputtering parameters, specifically: the flow rate of argon gas is 6 sccm, the flow rate of nitrogen gas is 2 sccm, the working air pressure is maintained at 0.86 Pa, the rotating speed of the workpiece holder is 5 r / min, and the target base distance is 65 mm. The AlTiVNbCr high-entropy alloy target power is 200W, the B target power is 50W, the substrate bias voltage is 250V, and the substrate temperature is 400°C.

[0052] Using the same test method as in Example 1, after testing, Al: 14.89at.%, Ti: 4.70at.%, V: 3.26at.%, Nb: 5.34at in the (AlTiVNbCr) BN high-entropy alloy nitride coating .%, Cr: 4.51at.%, N: 56.63at.%, B: 10.67at.%, the coating thickness is 0.78μm, the film-base bonding force is 72.20N, the hardness is 53.77GPa, and the friction coefficient is 0.69.

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Abstract

The invention discloses a high-entropy alloy nitride cutter coating and a preparation method thereof. The preparation method comprises the steps that a cutter base body is sequentially subjected to oil removal treatment and cleaning; and an AlTiVNbCr high-entropy alloy target and a B target are used as sputtering sources, mixed gas of argon and nitrogen is used as working gas, and the (AlTiVNbCr)BN high-entropy alloy nitride coating is deposited on the cleaned cutter base body in the mode that radio frequency magnetron sputtering and direct current magnetron sputtering are combined. According to the high-entropy alloy nitride cutter coating and the preparation method thereof, the B-containing high-entropy alloy nitride cutter coating is prepared in a double-target co-sputtering mode, the content of the B element can be accurately controlled, a large amount of volatilization of the B element during preparation of the B-containing high-entropy alloy target material is avoided, the process is simple, and the cost is low; the coating prepared in the mode of combining radio frequency magnetron sputtering and direct current magnetron sputtering is high in hardness, small in grain size, compact in structure and uniform in component; and the thickness of the coating can be adjusted by adjusting the power, so that the hardness and the wear resistance of the superhard high-entropy alloy nitride coating are improved, and the application range is expanded.

Description

technical field [0001] The invention belongs to the technical field of metal coatings, and in particular relates to a high-entropy alloy nitride tool coating and a preparation method thereof. Background technique [0002] Cutting tools are tools used for cutting in mechanical manufacturing. Most of the tools are used by machines, but they are also used by hand. Since the knives used in mechanical manufacturing are basically used to cut metal materials, knives are generally understood as metal cutting tools. [0003] With the advancement of science and technology, the hardness of the metal material to be cut is getting higher and higher. Furthermore, a metal nitride coating is added to the surface of the traditional tool. The metal nitride coating has the characteristics of high hardness, strong wear resistance, and good chemical stability. . [0004] However, with the further development of science and technology, traditional tool coatings can no longer meet the needs of i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/02C23C14/54
CPCC23C14/0036C23C14/3464C23C14/0641C23C14/022C23C14/54
Inventor 邵文婷伍翔宇陈建杨巍武上焜张瑞红李仲硕刘曜
Owner XIAN TECH UNIV
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