Method for depositing diamond-like carbon film on surface of inner wall of metal cylinder (or tube) with large length-diameter ratio

Abstract

The invention relates to a method for depositing a diamond-like carbon film on the surface of the inner wall of a metal cylinder (or tube) with a large length-diameter ratio (L / D) or a small diameter. The method includes the steps of: forming a plasma electric field between a wire mesh anode and the inner wall of the metal cylinder (or tube) by using a cylinder (or tube)-shaped anode made of a metal wire mesh and the inner wall, which is used as a cathode, of the metal cylinder (or tube), wherein meshes of the wire mesh anode become channels for uniformly distributing a reaction gas, and an Ar gas, Si(CH3)4, H2, C2H2 or a mixed gas thereof is respectively introduced to the reaction gas; applying a high voltage to the plasma electric field, wherein high-energy gamma-electrons in the electric field bombard the wire mesh anode and are absorbed by the wire mesh anode at the same time to generate a current; and enabling the temperature of the wire mesh anode to rise by the bombardment of the high-energy gamma-electrons and the current, controlling the temperature of the wire mesh anode to be stabilized at about 300 DEG C, and enabling the wire mesh anode to radiate for heating the inner wall of the cylinder in a vacuum environment so as to make the inner wall of the cylinder reach the temperature (150-200 DEG C) required by deposition of the diamond-like carbon film, thereby improving the interface bonding strength of the film and the component content of diamond.

Description

technical field [0001] The invention relates to a method for depositing a DLC diamond-like film material on the inner wall of a metal cylinder (or tube), in particular to a deposition method for depositing a diamond-like film material on the inner wall of a cylinder or tube with a large aspect ratio. Background technique [0002] Diamond-Like Carbon Coatings (DLC film for short) is a solid lubricating film material that has hardness and wear resistance similar to pure diamond, and has an extremely low coefficient of friction (0.1-0.3). With good optical, electrical and mechanical properties, it is widely used in machinery, electronics, chemistry, biomedicine, aerospace, military industry and other fields, and has broad application prospects. Especially in terms of wear reduction and low friction, it greatly improves the motion state of mechanical parts, prolongs the service life of parts, improves the operation reliability of machinery and equipment, and achieves the purpose...

AI Technical Summary

Problems solved by technology

[0003] At present, the methods for preparing DLC ​​diamond-like film materials include physical vapor deposition (PVD) and chemical vapor deposition (CVD), from which ion beam deposition, cathodic arc deposition, magnetron sputtering deposition, laser deposition, plasma deposition, etc. Body-enhanced chemical vapor deposition and hot wire plasma chemical vapor deposition, etc. Although there are many deposition methods, there are not many technologies that can truly realize industrial manufacturing. Foreign countries have achieved the level of semi-industrialization, while my country is still in the research and development stage. Large-scale industrial production and market application have not been realized, and there are still many technical problems that need to be solved for industrial production

[0004] At present, it is very difficult to deposit DLC films on the inner walls of metal cylinders (or tubes), especially for the deposition of DLC films on the inner walls of cylindrical or tubular parts with a large length-to-diameter ratio (L / D). Yes: Between the long and narrow cathode and anode plates, the flow area is narrow, the reaction gas transportation is difficult, the temperature field distribution and electric field intensity distribution are uneven, and the plasma formation is difficult, which makes it difficult for the film to grow on the inner wall surface of the large aspect ratio cylinder.

However, the flow state and distribution of the hydrocarbon gas used greatly affect the deposition effect of the DLC film, and it is difficult to form a stable and uniform plasma electric field and the required uniform temperature field in the narrow and long channel, so that the metal with a large aspect ratio It is difficult to deposit DLC diamond-like carbon film material on the inner wall of the cylinder (or tube)

Images