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Waste fluid treatment apparatus and processing water regeneration system

A technology for waste liquid treatment and processing waste liquid, which can be used in sedimentation treatment, water/sewage treatment, natural water treatment, etc. It can solve the problem of time-consuming, and achieve the effect of reducing burden, improving sedimentation speed and accelerating sedimentation.

Pending Publication Date: 2021-06-22
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it takes time to settle small machining chips with a size of 0.5 μm to 5 μm in the settling tank, so there is a problem that a large-capacity settling tank is required

Method used

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  • Waste fluid treatment apparatus and processing water regeneration system
  • Waste fluid treatment apparatus and processing water regeneration system
  • Waste fluid treatment apparatus and processing water regeneration system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] figure 1 The machining device A is shown is a processed product (e.g., silicon wafer, silicon ingot) that is maintained at the chuck table, while the machining device A is supplied to the machining water (e.g., pure water) while using a rotating grinding abrasive. Wait, etc., the grinding device is made, or the rotating cutting tool is applied to the processed product (e.g., silicon wafer, etc.) held in the chuck table, while supplying the processed water. Cut cutting devices, and the like.

[0029] The waste liquid treatment apparatus 9 of the present embodiment is attached to the processing waste liquid flow into the tube 90 composed of a metal pipe or a tube or the like having a flexible tube, and the waste liquid treatment device 9 receives the discharge from the processing device A. Contains pattern B (eg, SiO) 2 Dia, PSL (polystyrene emulsion) crumping or SiCzuce, refer to figure 2 The processing waste liquid L is precipitated from the processing waste B to remove th...

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PUM

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Abstract

The invention provides a waste liquid treatment device and a processing water regeneration system. The purpose of the present invention is to reduce the burden of an operator associated with the replacement of a filter in a waste liquid treatment device, and to miniaturize a precipitation tank of the waste liquid treatment device. The waste liquid treatment device comprises a precipitation tank for storing processing waste liquid containing processing chips; the inlet is used for the processing waste liquid to enter the precipitation tank; an acidic unit which enables the processing waste liquid entering the precipitation tank from the inlet to be acidic, so that the precipitation speed of the processing chips is improved compared with that when the processing waste liquid is neutral; and an outlet for discharging supernatant water from the precipitation tank, the supernatant water being obtained by precipitating the processing chips in the processing waste liquid in the precipitation tank.

Description

Technical field [0001] The present invention relates to a waste liquid treatment apparatus removed from the processing waste liquid and a processed water regeneration system for processing water. Background technique [0002] For example, in the processed water circulating apparatus disclosed in Patent Document 1, the process sh is removed from the processing waste liquid, whereby the regeneration of the processed water is carried out from one side to supply the processed water while using the abrasive tool to be processed. Processing waste liquid comprising process chips in the processing device. However, small process chips such as 0.5 μm to 5 μm need to take a time in the precipitation trough, so there is a problem such as a precipitation tank that requires a large capacity. Therefore, for example, in the processing waste treatment apparatus disclosed in Patent Document 2, the apparatus is miniaturized by using the formation of the process waste containing the processing waste...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C02F9/04C02F9/08
CPCC02F1/52C02F1/66C02F9/00C02F1/008C02F1/32C02F1/42C02F2209/06C02F2209/00C02F2001/007C02F2103/346C02F1/444C02F2209/03C02F1/68B01D21/0045
Inventor 竹之内研二柏木宏之诹访野纯
Owner DISCO CORP
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