Flue gas separation and purification system for producing electronic-grade sulfuric acid

Abstract

The invention relates to a flue gas separation and purification system for producing electronic-grade sulfuric acid. The system comprises a dust remover, a washing tower, a demister, a nicotinic acid absorption tower, a nicotinic acid evaporation tank and a condensation tank which are sequentially connected, wherein the washing tower and the nicotinic acid absorption tower are further sequentially connected with a circulating tank and a nicotinic acid cooler, and 98% sulfuric acid solution is arranged in the bottom of the dust remover, the bottom of the demister and the circulating tank; a water inlet structure is arranged on the upper portion of the condensation tank body and comprises a first pipe plate arranged on the upper portion of the condensation tank body and a cooling water distribution pipe arranged on the inner side of the tank body, the upper portion of the cooling water distribution pipe is connected with a cooling water inlet pipe, a water distribution ring plate is arranged on the inner side of the cooling water distribution pipe, a notch is formed in the upper portion of the water distribution ring plate, and the lower portion of the water distribution ring plate is arranged on the first pipe plate. A heat exchange pipe is vertically arranged in the first pipe plate, and the top of the heat exchange pipe extends out of the first pipe plate and is evenly provided with a plurality of notches. By utilizing the system, high-purity sulfur trioxide can be obtained, and when the sulfur trioxide is condensed, no pressure exists in the heat exchange pipe, so that the safety is improved.

Description

Technical field[0001]The present invention relates to the field of electron-level sulfuric acid production, and more particularly to flue gas separation and purification systems for producing electron-level sulfuric acid.Background technique[0002]Electronic grade sulfuric acid is also known as high purity sulfuric acid, ultrapure sulfuric acid, belonging to ultra-clean high purity reagents, is a high-tech product combined with electronic materials and fine chemicals, widely used in semiconductor, large scale integrated circuit assembly and processing, silicon wafers Cleaning and etching can effectively remove impurity particles, inorganic residues and carbon deposited on wafers. As the integrated circuit (IC) is large and large, the chip integration is getting higher and higher, the photolithography lines of the wafer surface are getting worse, and the quality requirements for electron grade sulfuric acid are increasing strict.[0003]The preparation process of electronic sulfuric aci...

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Problems solved by technology

[0011] The present invention solves the problem that the device for preparing sulfur trioxide by separating and purifying flue gas in the prior art cannot remove impurities in the flue gas and cannot obtain high-purity sulfur trioxide, and that the cooling water inlet is unevenly distributed when sulfur trioxide condenses, As well as the problem that the cooling water exerts pressure on the heat exchange tubes and the safety is not high, a flue gas separation and purification system for the production of electronic grade sulfuric acid is provided

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