Multilayer film thickness and optical characteristic detection method
A technology of optical characteristics and detection methods, applied in the field of optical detection, can solve problems that do not involve surface roughness and optical characteristics, etc.
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[0036] In order to further explain the purpose, technical solution and features of the present invention, the multilayer film thickness and optical characteristic detection method will be further described in detail below in conjunction with the accompanying drawings and specific implementation examples.
[0037] A method for detecting the thickness and optical characteristics of a multilayer film, comprising:
[0038] S1, deposit thin films on the substrate in order to form a multilayer film, and the thin films of the multilayer film are classified into diamond film and diamond film; wherein: the substrate is a diamond substrate, Si or Ge glass, and other materials can also be selected according to needs. substrate; the multilayer film has at least three layers, and, if image 3 As shown, the bottom layer of the multilayer film is the substrate, the substrate is a diamond-like film or a diamond film, the top layer is a diamond film as a protective layer, and the middle layer ...
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