Gas distribution valve terminal and gas distribution method of waste gas treatment equipment

A technology for waste gas treatment equipment and gas distribution valves, which is applied in the direction of mechanical equipment, valve devices, multi-way valves, etc., can solve problems such as unstable gas distribution and effective treatment of difficult waste gas, so as to facilitate effective treatment, ensure stability, and improve The effect of input efficiency

Active Publication Date: 2020-12-25
BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Problems solved by technology

[0005] The embodiment of the present invention provides a gas distribution method for the gas distribution valve island and the waste gas treatment equipment, which is used to solve the problem that the existing gas distribution valve island is only used for centralized gas distribution, the gas distribution is unstable, and it is difficult to completely treat the waste gas treatment equipment. The problem of effective treatment of waste gas

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  • Gas distribution valve terminal and gas distribution method of waste gas treatment equipment

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Embodiment Construction

[0021] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0022] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be directly connected, or...

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Abstract

The embodiments of the invention provide a gas distribution valve terminal and a gas distribution method of waste gas treatment equipment. The gas distribution valve terminal comprises a gas storage chamber and a plurality of gas circuit switching units, wherein the gas storage chamber communicates with a gas distribution hole; and the gas circuit switching units correspondingly communicate with agas inlet, a gas outlet and the gas storage chamber, and are used for controlling the switching of the communication states of the gas inlet and the gas outlet with the gas storage chamber. Integration and simplification of the gas distribution structure are achieved, cleaning, split disassembly and fault point query are facilitated, when the gas distribution valve terminal is used for gas distribution of the waste gas treatment equipment, the input efficiency of waste gas can be greatly improved, and the gas distribution stability is ensured; and the untreated waste gas can be conveniently and effectively treated when the waste gas treatment equipment is shut down based on the exhaust arrangement of the gas distribution valve terminal.

Description

technical field [0001] The invention relates to the technical field of gas distribution valves, in particular to a gas distribution valve island and a gas distribution method for waste gas treatment equipment. Background technique [0002] In the semiconductor manufacturing process, highly corrosive semiconductor waste gas will be produced, among which semiconductor waste gas includes chlorine gas, hydrogen chloride, hydrogen fluoride, fluorine gas, ammonia gas, etc. Due to the toxic, harmful, flammable and explosive characteristics of semiconductor waste gas, combustion-type waste gas treatment equipment is used for uniform combustion treatment of semiconductor waste gas. [0003] At present, during the combustion treatment of semiconductor waste gas, the waste gas produced by each semiconductor production line is usually transported to the waste gas treatment equipment through the gas transmission main pipe, and at the end of the gas transmission main pipe, a plurality of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K11/22F17D3/01
CPCF16K11/22F17D3/01
Inventor 何磊
Owner BEIJING JINGYI AUTOMATION EQUIP CO LTD
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