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Composite nano-film material based on graphene quantum dot functionalization and gas sensitive sensing element

A technology of graphene quantum dots and nano-film materials, which is applied in the direction of analysis materials, material resistance, metal material coating technology, etc., can solve problems such as unfavorable high-performance sensing materials, and achieve improved sensitivity, low detection limit, and fast response /recovery time effect

Active Publication Date: 2020-12-01
NANJING UNIV OF INFORMATION SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to its own characteristics, the size of the nanoparticles in the nanostructures usually prepared by the hydrothermal synthesis method is more than 10 nanometers, which is not conducive to obtaining high-performance sensing materials.

Method used

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  • Composite nano-film material based on graphene quantum dot functionalization and gas sensitive sensing element
  • Composite nano-film material based on graphene quantum dot functionalization and gas sensitive sensing element
  • Composite nano-film material based on graphene quantum dot functionalization and gas sensitive sensing element

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Embodiment 1

[0040] The present invention is based on graphene quantum dot functionalized tin oxide / zinc oxide H 2 The steps of the S sensor and its preparation method are as follows:

[0041] 1. First, use a plasma cleaning machine to clean the gas sensor device (the preparation process of gas sensor device loaded graphene refers to the literature (New Journal of Chemistry, 38(2014), 2362-2367), start the vacuum pump, and after vacuuming , Open the oxygen and argon gas circuit valves, feed oxygen and argon into the cleaning machine, control the pressure in the cleaning machine to 60Pa, start the cleaning machine, and the cleaning time is 5mins-10mins.

[0042] 2. Place the cleaned gas sensor element in the vacuum chamber of the magnetron sputtering equipment, use metal zinc with a mass purity of 99.99% as the target material, and use argon gas with a mass purity of 99.99% as the working gas. Sputter deposition of metal zinc film on the cleaned gas sensor element;

[0043] 3. In the proc...

Embodiment 2

[0060] The present invention is based on graphene quantum dot functionalized tin oxide / zinc oxide H 2 The steps of the S sensor and its preparation method are as follows:

[0061] 1. First, use a plasma cleaning machine to clean the gas sensor device (the preparation process of gas sensor device loaded graphene refers to the literature (New Journal of Chemistry, 38(2014), 2362-2367), start the vacuum pump, and after vacuuming , Open the gas path valves of oxygen and argon, feed oxygen and argon into the cleaning machine, control the pressure in the cleaning machine to 80Pa, start the cleaning machine, and the cleaning time is 5mins-10mins.

[0062] 2. Place the cleaned gas sensor element in the vacuum chamber of the magnetron sputtering equipment, use metal zinc with a mass purity of 99.99% as the target material, and use argon gas with a mass purity of 99.99% as the working gas. Sputter deposition of metal zinc film on the cleaned gas sensor element;

[0063] 3. In the proc...

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Abstract

The invention discloses a composite nano-film material based on graphene quantum dot functionalization. The composite nano-film material is in a film shape, the main body is a ZnO nanosheet, and the surface is covered with graphene quantum dots and stannic oxide quantum crystal grains; the ZnO nanosheet serving as the main body is hexagonal, the average side length is 1.5 to 2.4 mu m, and the average thickness is 50 to 100nm; the average size of the graphene quantum dots ranges from 3.2 nm to 4.3 nm, and the average size of the stannic oxide quantum crystal grains ranges from 3.5 nm to 5.2 nm.The multistage structure sensing material is prepared by comprehensively using a hydrothermal method and a post thermal evaporation method, the synthesis method is simple, and the cost is low.

Description

technical field [0001] The invention relates to the technical field of semiconductor oxide gas sensors, in particular to a gas-sensitive sensing element using a composite nano-film material functionalized based on graphene quantum dots. Background technique [0002] The non-invasive diagnostic technology based on metal oxide semiconductor gas sensors has the advantages of fast dynamic process, low cost and good portability. Real-time detection of biomarkers in exhaled breath has become a research hotspot. These sensors are capable of diagnosing diseases by detecting disease biomarkers in human exhaled breath containing specific volatile organic compounds (VOCs, volatile organic compounds, volatile organic compounds), which have a strong correlation with specific diseases. Previous studies have found that certain biomarkers in exhaled breath, such as hydrogen sulfide gas, are associated with bad breath. Compared with healthy people, the hydrogen sulfide gas content exhaled ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12C23C14/14C23C14/35C23C14/58C23C26/00C23C28/04
CPCG01N27/127C23C14/14C23C14/35C23C14/5853C23C26/00C23C28/04Y02A50/20
Inventor 邵绍峰林纪栋夏雨萱刘星宇
Owner NANJING UNIV OF INFORMATION SCI & TECH
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