Induction element of pyroelectric sensor, manufacturing method of induction element and pyroelectric sensor

Abstract

The invention discloses an induction element of a pyroelectric sensor, a manufacturing method of the induction element and the pyroelectric sensor. The manufacturing method of the induction element comprises the following steps: S1, providing an insulating substrate and a PZT piece; S2, respectively plating metal on one surface of the insulating substrate and one surface of the PZT sheet to form ametal plating film; S3, superposing the insulating substrate and the PZT sheet in a manner that the metal coating films are opposite to each other, and bonding the two layers of metal coating films to enable the PZT sheet to be compounded on the insulating substrate; S4, grinding the PZT sheet, so that the thickness of the PZT sheet is reduced to 0.015 mm to 0.065 mm; and S5, manufacturing an electrode layer on the PZT sheet to obtain an induction element. According to the induction element of the pyroelectric sensor, the insulating substrate and the PZT sheet are bonded through the metal coating film, then the ultrathin thickness of the induction element is achieved by grinding the PZT sheet, the pyroelectric coefficient, the internal resistance, the dielectric constant and the capacitance effect of the sensing element are remarkably improved, the mechanical strength is improved, large-size machining is achieved, and batch production is facilitated.

Description

technical field [0001] The invention relates to a pyroelectric sensor, in particular to an induction element of the pyroelectric sensor, a manufacturing method thereof, and a pyroelectric sensor. Background technique [0002] The existing preparation method of pyroelectric sensor: use PZT (lead zirconate titanate piezoelectric ceramic) ceramic ingot to cut, and then obtain a small-sized sheet with a thickness of 0.08-0.15mm through grinding and polarization processes, and then cut into a small-sized sensor The elements are then assembled to form a pyroelectric sensor. [0003] Existing preparation method has following shortcoming: [0004] 1. After cutting, the thickness of the PZT ceramic sheet is large; [0005] 2. The mechanical strength of PZT ceramic material itself (0.1mm thick), the thickness is difficult to achieve further thinning; [0006] 3. Because the material itself is easily damaged, the processing size is small, usually a disc with a diameter of 25-65mm; ...

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Problems solved by technology

[0004] 1. The thickness of the PZT ceramic sheet is large after cutting;

[0005] 2. The mechanical strength of PZT ceramic material itself (0.1mm thick), the thickness is difficult to achieve further thinning;

[0007] 4. The production scrap rate is high;

[0008] 5. Because of the large thickness (0.08-0.15mm), the voltage required for the polarization process is high, requiring 400-600V

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