Efficient ultra-precise polishing method based on shear expansion effect

Abstract

The invention provides an efficient ultra-precise polishing method based on a shear expansion effect. Abrasive particles, a dispersing agent and an active agent are added into a viscoelastic materialwith non-Newtonian fluid characteristics to prepare a flexible fixation grinding tool, a viscoelastic gum base accounts for 50%-85% of the grinding tool by mass, the abrasive particles account for 10%-45% of the grinding tool by mass, the particle size of the abrasive particles ranges from 0.05-50 microns, the dispersing agent accounts for 1-5% of the grinding tool by mass, and the active agent accounts for 1-5% of the grinding tool by mass. In the polishing process, the contact area between the grinding tool and a workpiece generates a shear expansion effect under the action of shear force, an instantaneous expansion ejection phenomenon and a curing effect are present, and the viscosity, the hardness and the internal resistance of the grinding tool materials are increased. The stress uniformity of the surface of the workpiece is improved, the contact positive pressure of the abrasive particles and the workpiece is increased, so that the removal rate of the materials in the polishing process is increased, damage of local stress concentration to the surface of the workpiece is reduced, and the effect of efficient and high-quality polishing is achieved.

Description

technical field [0001] The invention belongs to the field of ultra-precision polishing, relates to an ultra-precision polishing method based on the shear expansion effect of non-Newtonian fluid, and is suitable for an efficient and high-quality ultra-precision polishing method for hard and brittle materials that are difficult to process. Background technique [0002] Hard and brittle materials that are difficult to process include refractory metals, hard alloys, ceramic materials, sapphire, silicon carbide, optical glass, crystalline silicon, etc., which have the advantages of high temperature resistance, high hardness, wear resistance, and corrosion resistance. Aerospace, auto parts, engineering applications, semiconductors, mobile phone tablet processing and many other fields are indispensable materials for national defense construction and economic development. However, due to the shortcomings of high brittleness and low plasticity and toughness, such materials usually fa...

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Problems solved by technology

[0006] In order to overcome the problems of efficiency, cost, precision and environmental protection in the current ultra-precision polishing, the present invention proposes an efficient and high-quality ultra-precision polishing method based on the shear expansion effect of non-Newtonian fluid

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