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Flexible self-supporting ZnO ultraviolet detector and preparation method thereof

An ultraviolet detector and self-supporting technology, applied in the field of ultraviolet detection, can solve the problems of limiting the preparation of flexible devices, the flexible substrate is not resistant to high temperature, and the material cannot be directly prepared, and achieves simple and efficient response speed, fast response speed, and preparation. Process controllable and designable effects

Active Publication Date: 2020-06-05
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

[0003] Traditional ZnO UV detectors are mainly based on sapphire, silicon wafer or quartz, which cannot be bent or transferred
However, the substrates used in ZnO micro-nano-structured flexible ultraviolet detectors are not resistant to high temperatures, and most of them can withstand a temperature limit of 150-200°C. Materials cannot be directly prepared on flexible substrates, which limits the preparation of flexible devices.
In view of this, it is urgent to study a flexible self-supporting ZnO ultraviolet detector and its preparation method to solve the technical problem that the flexible substrate of the existing ZnO micro-nano structure flexible ultraviolet detector is not resistant to high temperature

Method used

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  • Flexible self-supporting ZnO ultraviolet detector and preparation method thereof
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  • Flexible self-supporting ZnO ultraviolet detector and preparation method thereof

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preparation example Construction

[0041] The present invention also provides a method for preparing the above-mentioned flexible self-supporting ZnO ultraviolet detector, comprising the following steps:

[0042] S1: preparing the tetrapod ZnO nanostructure layer;

[0043] S2: fixing the two electrodes on the tetrapod ZnO nanostructure layer by bonding;

[0044] S3: Transfer the tetrapod ZnO nanostructure layer bonded with the two electrodes to the flexible substrate, and compact and fix it. Before compacting, spread sulfuric acid paper to avoid the tetrapod ZnO nanostructure layer. The structural layer is damaged and contaminated during the compaction process, and a flexible self-supporting ZnO ultraviolet detector is obtained.

[0045] Wherein, the method for preparing the tetrapod ZnO nanostructure layer in the step S1 is any one of flame transmission method, chemical vapor deposition method and hydrothermal method. When adopting chemical vapor deposition to prepare the tetrapod ZnO nanostructure layer, the ...

Embodiment 1

[0052] The preparation method of the flexible self-supporting ZnO ultraviolet detector of an embodiment of the present invention comprises the following steps:

[0053] S1: preparing the tetrapod ZnO nanostructure layer, the specific steps are:

[0054] S10: Grinding and mixing ZnO powder and graphite powder uniformly at a mass ratio of 1:1, and then placing them in a chemical vapor deposition device as a growth source;

[0055] S11: Under the protection of argon, the chemical vapor deposition equipment is heated up. The temperature rise control parameters are: 50min from room temperature to 1000°C, 30min from 1000°C to 1150°C; when the temperature rises to about 1000°C, oxygen is introduced , control the oxygen flow rate to 16sccm;

[0056] S12: keeping the temperature at 1150° C. for 60 minutes for growing and depositing tetrapod ZnO nanostructures;

[0057] S13: After the deposition is completed, the temperature is lowered to room temperature, and the tetrapod-shaped ZnO ...

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Abstract

The invention provides a flexible self-supporting ZnO ultraviolet detector, which belongs to the technical field of ultraviolet detection. The flexible self-supporting ZnO ultraviolet detector comprises a quadruped ZnO nano-structure layer, two electrodes arranged on the surface of the quadruped ZnO nano-structure layer, and a flexible substrate; and the quadruped ZnO nano-structure layer independently exists to realize self-supporting, and is arranged on the flexible substrate through transfer. The invention also provides a preparation method of the flexible self-supporting ZnO ultraviolet detector. According to the ultraviolet detector, the quadruped ZnO nanostructure layer is adopted, the ultraviolet detector has a special quadruped structure, four nanowires are used as a unit and stacked to form a flocculent self-supporting structure, and the flexible ultraviolet detector with high response speed is simply and efficiently obtained; and the tetrapod-shaped ZnO nano-structure layer is high in crystallization quality, excellent in performance, high in light and dark inhibition ratio and high in response speed, can be applied to manufacturing of a flexible ultraviolet detector, andeffectively solves the problem that a substrate in an existing ZnO micro-nano structure flexible ultraviolet detector is not resistant to high temperature.

Description

technical field [0001] The invention relates to the technical field of ultraviolet detection, in particular to a flexible self-supporting ZnO ultraviolet detector and a preparation method thereof. Background technique [0002] Ultraviolet detection technology is another military-civilian dual-use detection technology that has emerged after laser and infrared detection technology. Modern ultraviolet detection technology is a multi-disciplinary precision that integrates ultraviolet detectors, optical design, micromachining and integrated circuits. detection system. Due to its low false alarm rate, good concealment and strong anti-electromagnetic interference ability, it has been widely used in many fields such as sewage purification ultraviolet detection, fire monitoring, missile early warning, ultraviolet communication, and ozone layer hole detection. In recent years, wide-bandgap semiconductor ultraviolet detectors are considered to be the third-generation ultraviolet detec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0296H01L31/0224H01L31/18
CPCH01L31/0296H01L31/1828H01L31/022408Y02P70/50
Inventor 刘可为郑智遥陈星申德振张振中李炳辉
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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