Method for manufacturing electrode window and semiconductor device with electrode window

Abstract

The invention discloses a method for manufacturing an electrode window, which comprises the following steps: making an outwardly protruding protrusion on the first surface of a semiconductor body; preparing an insulating layer and planarizing in sequence on the side where the protrusion is formed on the semiconductor body layer, the insulating layer covers the outer surface of the protrusion and has a first color different from the planarization layer; the planarization layer covers the insulating layer, and the vertical area and the outer space of the first surface, and is in the area near the top of the protrusion forming a continuous plane on one side of the planarization layer; performing an etching process, the etching process includes performing an etching process on the continuous plane of the planarization layer until the insulating layer having a first color is exposed; and performing an etching process on the exposed insulating layer Etching process, a second etching process for forming an opening exposing the top region of the protrusion. The above manufacturing method can manufacture the electrode window by automatic alignment etching, which reduces the difficulty of manufacturing the electrode window, and is suitable for opening the electrode window on the ridge waveguide device with narrow line width.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an electrode window and a method for manufacturing a semiconductor device with the electrode window. Background technique [0002] Semiconductor optical devices represented by semiconductor lasers, semiconductor optical amplifiers, etc., use semiconductor materials to form an active region, and the active region is stimulated to generate electromagnetic radiation to emit laser light to achieve its optical performance. Due to the advantages of low power consumption, long service life, high electro-optical conversion efficiency, and wide coverage of wavelength bands, semiconductor optical devices can be widely used in fiber optic communications, laser storage, laser display, laser marking, machining, biomedicine and Military and other fields. [0003] In the design and manufacture of semiconductor optical devices, in order to better realize the confinement of carriers and l...

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Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art that opening electrode windows on the top of the ridge waveguide requires high photolithographic precision and high difficulty in preparation.

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