Sub-aperture central liquid supply optical surface serial machining process and tool

Abstract

The invention discloses a sub-aperture central liquid supply optical surface serial machining process. The serial machining process is a systematic machining method from a blank surface to an ultra-smooth surface based on a hydrodynamic pressure principle and mainly comprises a hydrodynamic pressure consolidation abrasive grinding and polishing process, a central liquid supply small grinding headpolishing process and a disc-type hydrodynamic pressure polishing process. A sub-aperture central liquid supply optical surface machining tool comprises an elastic coupler, a polishing disc and a polishing pad, wherein the two ends of the flexible coupler are respectively connected with the polishing disc and a rotating shaft; and successive recursion inhibition processes of low-frequency, medium-frequency and high-frequency errors of the optical surface are achieved by replacing different grinding pads and polishing pads on the same machining tool. Meanwhile, in order to obtain a high-qualityand low-damage ultra-precision smooth surface, different grinding pads and polishing pads are combined to use, the residual sub-surface damage layer on the surface after being polished in premier polishing process is removed, no new sub-surface damage is generated any more, and the sub-surface damage is reduced to the minimum through multiple machining processes.

Description

technical field [0001] The invention belongs to the field of optical processing, and relates to a series of processing techniques for ultra-smooth optical surfaces based on the principle of fluid dynamic pressure, in particular to a systematic technique for processing optical surfaces from grinding surfaces to ultra-smooth surfaces. Background technique [0002] Optical glass is widely used in aerospace, information, energy, chemical, microelectronics and other fields due to its high transparency, optical uniformity, and stable chemical properties. With the vigorous development of optical technology and the increasingly wide application of optical materials, higher requirements are placed on the surface quality of optical components. Especially for high-power laser device systems, micro-electromechanical systems and other large-scale optical systems, the surface quality and processing efficiency of components are extremely demanding. Micron-level processing accuracy and nano...

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Problems solved by technology

Otherwise, its high-frequency and low-frequency errors will cause imaging such as spherical aberration, aberration, and distortion to affect the optical imaging quality, and high-frequency errors will cause energy loss in the application of strong light optical components

The above-mentioned optical glass surface molding methods are mainly aimed at the optical surface surface processing technology and method, but lack the effective control of the error in the entire frequency range from low frequency to high frequency on the surface of large-aperture aspheric optical elements and the ability to suppress surface damage after processing

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