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Preparation method of capacitive flexible sensor

A flexible sensor and capacitive technology, which is applied in fluid pressure measurement, instruments, and measuring devices using capacitance changes, can solve the problems of cumbersome steps, poor stretchability, and high cost, and achieves a wide range of applications and high preparation efficiency. , the effect of simple process

Inactive Publication Date: 2020-04-17
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The sensor has high sensitivity under the pressure of 0-5kPa, but it also has the following disadvantages: 1) the multi-layer microstructure and electrode metal layer are prepared by photolithography, electron beam evaporation, ozone cleaning, etc.
[0017] (1) Most flexible capacitive sensor electrodes are made of metal materials, which are poor in stretchability and expensive;
[0018] (2) Most studies improve the sensitivity of the sensor by introducing surface microstructures, and the processes of photolithography and etching are relatively complicated and the steps are cumbersome
[0019] (3) Most flexible capacitive sensors are not fully flexible, wearable performance is poor, and applications are limited

Method used

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  • Preparation method of capacitive flexible sensor
  • Preparation method of capacitive flexible sensor
  • Preparation method of capacitive flexible sensor

Examples

Experimental program
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Effect test

Embodiment 1

[0048] The pure silicone rubber formula used as the dielectric layer of the capacitive sensor is a mixture of 90wt% A-component PDMS base rubber and 10wt% B-component PDMS curing agent, and the viscosity after mixing is 3485mPa s; the conductive rubber used as the electrode layer of the capacitive sensor The formula is 45wt% A component PDMS base glue, 5wt% B component PDMS curing agent, 25wt% conductive filler carbon fiber, 5wt% plasticizer 1.2-propylene glycol and 20wt% diluent simethicone oil are added and mixed in order, after mixing The viscosity is 1469mPa·s. Prepare according to the following steps: ①Preparation of dielectric layer, put liquid pure silicone rubber into the spray gun, spray it on the sandpaper with surface roughness Ra of 48.6μm under the pressure of 0.7MPa, and further carry out vacuum under the environment of -0.1MPa Degassing for 10 minutes, and finally placed at 150°C for 5 minutes to cure and form; ② Electrode layer preparation, put the liquid condu...

Embodiment 2

[0051]The pure silicone rubber formula used as the dielectric layer of the capacitive sensor is a mixture of 88wt% A-component PDMS base rubber and 12wt% B-component PDMS curing agent, and the viscosity after mixing is 3367mPa s; the conductive rubber formula used as the electrode layer of the capacitive sensor 40wt% A-component PDMS base glue, 10wt% B-component PDMS curing agent, 20wt% conductive filler carbon fiber, 10wt% plasticizer 1.2-propylene glycol and 20wt% thinner dimethyl silicone oil were added and mixed in order, and the viscosity after mixing It is 1429mPa·s. Prepare according to the following steps: ①Preparation of the dielectric layer, put the liquid pure silicone rubber into the spray gun, spray it on the sandpaper with the surface roughness Ra of 22.0μm under the pressure of 0.7MPa, and further vacuum it under the environment of -0.1MPa Degassing for 10 minutes, and finally placed at 150°C for 5 minutes to cure and form; ② Electrode layer preparation, put the...

Embodiment 3

[0054] The pure silicone rubber formula used as the dielectric layer of the capacitive sensor is a mixture of 90wt% A component PDMS base rubber and 10wt% B component PDMS curing agent, and the viscosity after mixing is 3647mPa s; the conductive rubber formula used as the electrode layer of the capacitive sensor Add and mix 50wt% A component PDMS base glue, 5wt% B component PDMS curing agent, 25wt% conductive filler carbon fiber, 10wt% plasticizer 1.2-propylene glycol and 10wt% thinner simethicone oil in order, and the viscosity after mixing It is 1294mPa·s. Prepare according to the following steps: ①Preparation of the dielectric layer, put the liquid pure silicone rubber into the spray gun, spray it on the sandpaper with the surface roughness Ra of 31.7μm under the pressure of 0.7MPa, and further carry out vacuum under the environment of -0.1MPa Degassing for 10 minutes, and finally placed at 150°C for 5 minutes to cure and form; ② Electrode layer preparation, put the liquid ...

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Abstract

The invention provides a preparation method of a capacitive flexible sensor. Flexible conductive silicone rubber and pure silicone rubber are respectively used as an upper electrode layer, a lower electrode layer and a middle dielectric layer of the sensor. After surface microstructures with different roughness are introduced into the electrode layers and the dielectric layer, the prepared sensorhas different sensitivities and can be used for human body motion signal detection. The pure rubber used as the dielectric layer of the sensor is prepared by mixing liquid component A base rubber anda component B curing agent, the conductive rubber used as the conductive layers of the sensor is prepared by mixing the liquid component A base rubber, the component B curing agent, a conductive filler, a plasticizer and a diluent, and the flexible capacitive sensor with good mechanical signal response is obtained after spraying, curing and assembling. The capacitive flexible sensor has the characteristics of high sensitivity, short response time, small lag, strong stability and the like.

Description

technical field [0001] The invention relates to a preparation method of a capacitive flexible sensor. It belongs to the field of flexible electronic equipment. Background technique [0002] Flexible sensors have become a research hotspot in recent years because of their huge application prospects in the fields of human health monitoring, wearable electronic devices, human-computer interaction, and electronic skin. Compared with piezoresistive, piezoelectric, and field-effect transistor sensors, capacitive flexible sensors have the characteristics of low energy consumption, fast response, and low hysteresis, and have received extensive attention. The capacitive flexible sensor can convert the external mechanical stimulation signal into the change of capacitance value, and the change of capacitance value is recognized by the system immediately, so as to achieve the purpose of sensing. Conventional parallel-plate capacitive flexible sensors have a triple-sandwich structure, i...

Claims

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Application Information

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IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/148G01L9/12
Inventor 夏志东王雪龙赵陈黄培高沐赵少凡
Owner BEIJING UNIV OF TECH
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