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Application of imvite to magnetron sputtering target material, obtained imvite thin film and application

A technology of magnetron sputtering and montmorillonite, which is applied in sputtering coating, metal material coating process, ion implantation plating, etc., can solve the problems that limit the application field of montmorillonite, and achieve good flatness and porosity The effect of low rate and high density

Active Publication Date: 2020-04-17
HUBEI UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, in the prior art, montmorillonite is not separately prepared as a membrane material, which greatly limits the application field of montmorillonite

Method used

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  • Application of imvite to magnetron sputtering target material, obtained imvite thin film and application
  • Application of imvite to magnetron sputtering target material, obtained imvite thin film and application
  • Application of imvite to magnetron sputtering target material, obtained imvite thin film and application

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Experimental program
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Effect test

Embodiment 1

[0042] The application of montmorillonite in magnetron sputtering target material, described montmorillonite target material is prepared by following method:

[0043] (1) Take the montmorillonite powder and add it to absolute alcohol, the weight ratio of the montmorillonite powder and absolute alcohol is 1:1 to obtain a suspension;

[0044] (2) coating the suspension obtained in step (1) on the inner wall of the mould, around the upper press head and the contact surface, around the lower press head and the contact surface, the inner and outer surfaces of the bushing, and all surfaces of the upper and lower gaskets;

[0045] (3) Assemble the mold sleeve and bushing together, put the lower pressure head into the mold cavity, put the lower protective gasket, then take the montmorillonite powder, put it into the mold cavity, scrape the surface, and put it into the upper protective gasket piece, and then insert the upper indenter;

[0046] (4) Put the mold installed in step (3) in...

Embodiment 2

[0048] The application of montmorillonite in magnetron sputtering target material, described montmorillonite target material is prepared by following method:

[0049] (1) Take the montmorillonite powder and add it to absolute alcohol, the weight ratio of the montmorillonite powder and absolute alcohol is 1:2 to obtain a suspension;

[0050] (2) coating the suspension obtained in step (1) on the inner wall of the mould, around the upper press head and the contact surface, around the lower press head and the contact surface, the inner and outer surfaces of the bushing, and all surfaces of the upper and lower gaskets;

[0051] (3) Assemble the mold sleeve and bushing together, put the lower pressure head into the mold cavity, put the lower protective gasket, then take the montmorillonite powder, put it into the mold cavity, scrape the surface, and put it into the upper protective gasket piece, and then insert the upper indenter;

[0052] (4) Put the mold installed in step (3) in...

Embodiment 3

[0054] The application of montmorillonite in magnetron sputtering target material, described montmorillonite target material is prepared by following method:

[0055] (1) Take the montmorillonite powder and add it to absolute alcohol, the weight ratio of the montmorillonite powder and absolute alcohol is 1:1 to obtain a suspension;

[0056] (2) coating the suspension obtained in step (1) on the inner wall of the mould, around the upper press head and the contact surface, around the lower press head and the contact surface, the inner and outer surfaces of the bushing, and all surfaces of the upper and lower gaskets;

[0057] (3) Assemble the mold sleeve and bushing together, put the lower pressure head into the mold cavity, put the lower protective gasket, then take the montmorillonite powder, put it into the mold cavity, scrape the surface, and put it into the upper protective gasket piece, and then insert the upper indenter;

[0058] (4) Put the mold installed in step (3) in...

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Abstract

The invention relates to application of imvite to a magnetron sputtering target material, an obtained imvite thin film and application. The imvite is applied to the magnetron sputtering technology asthe target material in a specific manner. The imvite and anhydrous alcohol are firstly mixed to prepare suspension liquid, the phenomenon of mold sticking is avoided during hot pressing in the mannerof coating the surfaces of a mold with the suspension liquid, and it is guaranteed that the obtained target material gas good surface evenness; and then, in the sintering process, the method of achieving gradual temperature increase and staged heat preservation under the specific vacuum degree and pressure is adopted, on one hand, uniformity of the structure in the imvite is guaranteed, the density and purity of the imvite are improved, the porosity in the imvite is reduced, and on the other hand, imvite crystals with certain orientation can be obtained. According to a preparation method for the imvite thin film, the above high-density imvite is used as the target material, the film is formed through the magnetron sputtering technology, then annealing treatment is carried out to obtain theimvite thin film, and the obtained imvite thin film is uniform in structure, good in mechanical performance and excellent in dielectric performance.

Description

technical field [0001] The invention belongs to the technical field of magnetron sputtering targets, in particular to the application of montmorillonite in magnetron sputtering targets, the preparation method of montmorillonite films based on magnetron sputtering, the obtained montmorillonite films and their applications . Background technique [0002] Montmorillonite is a typical layered silicate non-metallic nano-mineral. It is widely used due to its characteristics of dispersibility, swelling, water absorption and low price. The application field of montmorillonite is very wide, especially through inorganic and organic modification, it is rich in many unique properties, and the application field is further expanded. It is known as "universal material" and is widely used in adsorbents and catalysts for toxic substances , Coating agents, especially polymer-layered nanocomposites, can improve the mechanical properties, flame retardancy and thermal stability of polymers, an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/08
CPCC23C14/081C23C14/3414C23C14/35
Inventor 吴倩沈谅平董明王浩
Owner HUBEI UNIV
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