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A new type of small boat transportation structure

A boat paddle and boat support technology, which is applied in the field of semiconductor or photovoltaic material processing, can solve the problems of deformation of the material to be processed, difficulty in automation, uneven coating, etc., and achieve the effect of light weight, reasonable design and simple structure

Active Publication Date: 2020-12-29
LAPLACE RENEWABLE ENERGY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In traditional equipment, the material to be processed is placed in a vertical insert. During the process, there is a problem that the process gas flow is disturbed or blocked, resulting in uneven coating on the material to be processed; the form of vertical insert is also prone to The material to be processed is deformed, and the automatic plugging and unplugging process of the equipment will easily lead to a high fragmentation rate of the material to be processed, and the degree of automation is difficult

Method used

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  • A new type of small boat transportation structure
  • A new type of small boat transportation structure
  • A new type of small boat transportation structure

Examples

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Effect test

Embodiment

[0034] A small boat transportation structure includes a small boat, a boat support and a boat paddle; the small boat is arranged on the boat support, and the boat paddle is arranged under the boat support; figure 1 The new boat shown includes a top plate 1, a bottom plate 2 and a groove bar 3; the top plate 1 and the bottom plate 2 are connected by the groove bar 3 to form a space for placing the boat plate of the material to be processed. The overall structure of the boat is simple, and its weight is light, which improves the load range as much as possible.

[0035] Wherein, groove bar 3 adopts many, and it is distributed between top plate 1 and base plate 2, and concrete groove bar 3 quantity, top plate 1 shape, base plate 2 shape all adapt to boat plate. For example, the boat plate adopts a rectangle, and the whole boat forms a cuboid, and four grooved rods 3 are distributed on the four corners of the top plate 1 and the base plate 2. Such as figure 2 , image 3 As show...

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Abstract

The invention discloses a novel small boat transportation structure, which comprises a small boat, a paddle and a boat holder; the boat is arranged on the boat holder, and the boat paddle is arranged under the boat holder; Connection; the boat paddle structure includes a boat support with handles on both sides and a boat support with a symmetrically arranged boat paddle; the boat support structure includes a vertical plate, a side plate, and the vertical plate and the side plate form a rectangular boat support; the vertical plate and / or the side plate Through holes are arranged on the top; the invention provides a new type of small boat transportation structure with simple structure, reasonable design and light weight.

Description

technical field [0001] The invention relates to the field of semiconductor or photovoltaic material processing, more specifically, it relates to a semiconductor processing equipment. Background technique [0002] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Semiconductor and photovoltaic materials usually require chemical treatment before they can be applied to products. CVD technology is one of the processing methods. CVD is chemical vapor deposition. CVD technology is currently It has been widely used in the processing of semiconductor or photovoltaic materials. Common processing equipment includes PECVD, LPCVD, APCVD, etc. In addition to CVD, there are also diffusion processes, such as phosphorus diffusion, boron diffusion, etc., which can use gas diffusion to treat raw materials. Processing. At present, there are many related equipment in the industry. The corresponding equipment can be selected for processing a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/458
CPCC23C16/4583
Inventor 甘新荣林佳继刘群朱太荣林依婷
Owner LAPLACE RENEWABLE ENERGY TECH CO LTD
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