Preparation and application of renewable terahertz biological sample detection cell
A biological sample and detection cell technology, applied in the field of terahertz biological sample detection cell, can solve the problems of many operation steps and complex detection
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[0047] The following is further described in detail through specific implementation methods:
[0048] combine Figure 1-9 As shown, the preparation of a reproducible terahertz biological sample detection cell includes the following steps: (1) Substrate substrate cleaning: take the silicon wafer and cut it, put the cut silicon wafer into an ultrasonic cleaner for cleaning, After taking it out, first clean it with an organic solvent and then rinse it with deionized water. In this embodiment, the organic solvent can be selected from ethanol, acetone or methanol, preferably ethanol, and then dry the surface of the silicon wafer with high-purity nitrogen;
[0049] (2) Deep silicon etching: engrave a single channel with a length and width of 7200 μm and a depth of 220 nm in the middle of every 1.5*1.5 cm area on the silicon wafer dried in step (1);
[0050] (3) Coating: a gold film with a thickness of 120nm is plated on the surface of the channel;
[0051] (4) Coating: Photoresist...
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