Aluminum-chromium-boron alloy target material and preparation method thereof

A technology of aluminum-boron alloy and alloy target, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problem of difficult to obtain high-quality and high-density targets, and uneven density distribution inside hot-pressed targets , It is difficult to ensure the uniformity of the product, etc., to achieve the effect of large specifications, small grains, and high density

Inactive Publication Date: 2019-12-03
河北宏靶科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the aluminum-chromium-boron alloy target is manufactured by vacuum melting and casting, the melting point of boron is as high as 2180°C and the density is 2.34g / cm3. The melting points and densities of the three alloys are quite different. Brittle phase, resulting in easy cracking of products during processing
When the aluminum chromium boron target is manufactured by the hot pressing method, it is difficult to achieve large-scale target production. At the same time, the internal density distribution of the hot pressing target is uneven, and the difference between the center and the edge density is as high as 5%. It is difficult to obtain a high-quality and high-density target.

Method used

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  • Aluminum-chromium-boron alloy target material and preparation method thereof

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preparation example Construction

[0028] See figure 1 , The present invention also provides a method for preparing an aluminum-chromium-boron alloy target, including the following steps:

[0029] Step 1) Powder preparation: use aluminum powder with a purity of 99.5% or more and an average particle size of 10-30um and a boron powder with a purity of 99.5% or more and an average particle size of 10-15um in a V-type mixer or Mixing in the three-dimensional mixer for 4-6 hours, and the mixing process is carried out under vacuum or high-purity argon protection conditions to prevent the powder raw materials from being oxidized during the mixing process.

[0030] Step 2) Sintering: Put the uniformly mixed aluminum and boron mixed powder into a vacuum sintering furnace, heat up to 1200-1600°C, control the temperature rise rate at 100-150°C / h, hold for 3-5h, and then cool down to room temperature along with the furnace to obtain Aluminum boron alloy block.

[0031] Step 3) Crushing and powdering: the sintered aluminum-boron...

Embodiment 1

[0039] The aluminum-chromium-boron alloy target provided by the embodiment of the present invention is made of the following atomic percentage raw materials: 60% aluminum, 30% chromium, and 10% boron. The preparation method includes the following steps:

[0040] Weigh boron powder with a purity of 99.5% and an average particle size of 10μm and aluminum powder with a purity of 99.5% and an average particle size of 30um, and mix them in a three-dimensional mixture according to the mass ratio of aluminum powder: boron powder = 15:1wt% Mix in the machine for 4 hours, and pour in high-purity argon for protection during the mixing process.

[0041] Put the mixed powder into a vacuum sintering furnace at a temperature of 1400°C and hold for 2 hours.

[0042] The sintered aluminum-boron alloy block is crushed and ball milled to make 100 mesh powder.

[0043] Weigh chromium powder with a purity of 99.5% and an average particle size of 106um, and 100 mesh aluminum boron powder, and mix them in...

Embodiment 2

[0050] The aluminum-chromium-boron alloy target provided by the embodiment of the present invention is made of the following atomic percentage raw materials: aluminum 52%, chromium 28%, and boron 20%. The preparation method includes the following steps:

[0051] Weigh boron powder with a purity of 99.5% and an average particle size of 10μm and an aluminum powder with a purity of 99.5% and an average particle size of 20um. According to the mass ratio of aluminum powder: boron powder = 6.5:1wt%, mix them in the three-dimensional mixer Mix for 4 hours, and pour in high-purity argon for protection during mixing.

[0052] Put the mixed powder into a vacuum sintering furnace at a temperature of 1300°C and hold for 3 hours.

[0053] The sintered aluminum-boron alloy block is crushed and ball milled to make 100 mesh powder.

[0054] Weigh chromium powder with a purity of 99.5% and an average particle size of 75um, and 100 mesh aluminum boron powder, and mix them in a mass ratio of chromium p...

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Abstract

The invention provides an aluminum-chromium-boron alloy target material which comprises the following components in percentage by atom: 30-80at% of aluminum, 10-50% of chromium and 5-30at% of boron. The invention also provides a preparation method of the aluminum-chromium-boron alloy target material. The preparation method comprises the following steps: mixing aluminum powder and boron powder under a vacuum or high-purity argon protection condition; sintering the uniformly mixed powder to obtain an aluminum-boron alloy block; crushing the aluminum-boron alloy block into aluminum-boron alloy powder; mixing chromium powder and aluminum-boron alloy powder under the vacuum or high-purity argon protection condition, and then conducting isostatic cool pressing to obtain a metal block; putting the metal block into a sheath, degassing, sintering and pressing in hot isostatic pressing equipment to obtain an alloy ingot blank; and finally, machining and cleaning the alloy ingot blank to obtain the finished target material. The aluminum-chromium-boron alloy target material prepared through the method is good in compactness, free of air holes, looseness and segregation, uniform in component, fine in grain and large in specification and size.

Description

Technical field [0001] The invention relates to the technical field of target materials, in particular to an aluminum-chromium-boron alloy target and a preparation method thereof. Background technique [0002] Hard coating is an important type of protective coating, playing an increasingly important role. The hard film material is plated on the surface of metal cutting tools to meet the higher requirements of modern manufacturing for metal cutting tools. [0003] Since the successful application of TiN films to tools by American companies, the research work on transition metal nitride hard films has been carried out for nearly forty years, and has gone from simple binary nitride films to ternary composite films, and then to multi-component composite films. The development process of multi-layer films. [0004] With the rapid development of modern manufacturing and higher requirements for cutting speed, a single TiN film can no longer meet the requirements of industrial production. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C22C1/04C22C21/00
CPCC22C1/0416C22C21/00C23C14/3407C23C14/3414
Inventor 姜海唐培新吕晓明姜慧王瑞刚许凤志
Owner 河北宏靶科技有限公司
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