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A kind of altisicon superhard coating and preparation method thereof

A kind of hard coating and coating technology, applied in coating, metal material coating process, vacuum evaporation coating and other directions, to achieve the effect of low internal stress, good film-base adhesion, and improved corrosion resistance

Active Publication Date: 2021-11-12
合肥永信信息产业股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

High-quality cutting tools are often played by the coating. The traditional single TiN coating can no longer meet the demand. How to prepare high-performance hard coatings is the research and development direction of many enterprises and research institutes.

Method used

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  • A kind of altisicon superhard coating and preparation method thereof
  • A kind of altisicon superhard coating and preparation method thereof
  • A kind of altisicon superhard coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] An AlTiSiCON superhard coating in this embodiment is 3-4 μm thick and is suitable for drill bits and the like.

[0048] The coating is a multilayer structure, such as figure 1 As shown, it includes a TiN primer layer, an AlTiN layer, an AlTiSiCN layer, an AlTiN layer, an AlTiSiCN layer, and an AlTiSiCON surface layer from the inside to the outside. The AlTiN layer, AlTiSiCN layer, AlTiN layer, and AlTiSiCN layer between the TiN primer layer and the AlTiSiCON surface layer constitute an alternate layer of AlTiN and AlTiSiCN as a whole.

[0049] Among them, the thickness of the TiN primer layer is 0.1-0.2 μm; the thickness of the single-layer AlTiN layer in the interlaced layer of AlTiN and AlTiSiCN is 0.2-0.3 μm; the thickness of the single-layer AlTiSiCN layer in the interlaced layer of AlTiN and AlTiSiCN is 0.2-0.4 μm ; AlTiSiCON surface thickness of 1.0-2.5μm.

Embodiment 2

[0051] An AlTiSiCON superhard coating in this embodiment has a thickness of 1.5-3 μm and is suitable for milling cutters, gear hobbing cutters, stamping dies and the like.

[0052] The coating is a multilayer structure, such as figure 1 As shown, it includes a TiN primer layer, an AlTiN layer, an AlTiSiCN layer, an AlTiN layer, an AlTiSiCN layer, and an AlTiSiCON surface layer from the inside to the outside. The AlTiN layer, AlTiSiCN layer, AlTiN layer, and AlTiSiCN layer between the TiN primer layer and the AlTiSiCON surface layer constitute an alternate layer of AlTiN and AlTiSiCN as a whole.

[0053] Among them, the thickness of the TiN primer layer is 0.1-0.2 μm; the thickness of the single-layer AlTiN layer in the interlaced layer of AlTiN and AlTiSiCN is 0.15-0.2 μm; the thickness of the single-layer AlTiSiCN layer in the interlaced layer of AlTiN and AlTiSiCN is 0.15-0.3 μm ; AlTiSiCON surface thickness of 0.8-2.0μm.

Embodiment 3

[0055] An AlTiSiCON superhard coating in this embodiment is less than 1.5 μm thick and is suitable for taps with high precision requirements.

[0056] The coating is a multilayer structure, such as figure 1 As shown, it includes a TiN primer layer, an AlTiN layer, an AlTiSiCN layer, an AlTiN layer, an AlTiSiCN layer, and an AlTiSiCON surface layer from the inside to the outside. The AlTiN layer, AlTiSiCN layer, AlTiN layer, and AlTiSiCN layer between the TiN primer layer and the AlTiSiCON surface layer constitute alternate layers of AlTiN and AlTiSiCN.

[0057] Among them, the thickness of the TiN primer layer is 0.1-0.2 μm; the thickness of the single-layer AlTiN layer in the interlaced layer of AlTiN and AlTiSiCN is 0.1-0.15 μm; the thickness of the single-layer AlTiSiCN layer in the interlaced layer of AlTiN and AlTiSiCN is 0.1-0.2 μm ; AlTiSiCON surface thickness of 0.5-1.0μm.

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Abstract

The invention relates to the field of vacuum coating, and provides an AlTiSiCON superhard coating. The coating is a multi-layer structure, which sequentially includes a TiN primer layer, an AlTiN layer, an AlTiSiCN layer, an AlTiN layer, an AlTiSiCN layer, and an AlTiSiCON surface layer from the inside to the outside. ; Among them, the AlTiN layer, AlTiSiCN layer, AlTiN layer, and AlTiSiCN layer between the TiN primer layer and the AlTiSiCON surface layer constitute the alternate layer of AlTiN and AlTiSiCN. The invention also provides a method for preparing AlTiSiCON superhard coating by using arc ion plating technology. The advantages of the present invention are: the coating of the present invention is used on the surfaces of tools, molds and core parts, which can make it have high hardness, low friction coefficient, good high temperature resistance and corrosion resistance, and can effectively prolong the life of the workpiece. service life.

Description

technical field [0001] The invention relates to the field of vacuum coating, in particular to an AlTiSiCON superhard coating prepared by vacuum ion plating technology and a specific preparation method thereof. Background technique [0002] Physical vapor deposition technology includes evaporation plating, sputtering plating, ion plating, etc. Compared with evaporation plating and sputtering plating, ion plating technology has the advantages of high ionization rate and good film-substrate bonding force. The development and application of traditional ion plating technology starts from the golden yellow TiN coating. With the diversification of tool processing environments, the requirements for tools are getting higher and higher. High-quality cutting tools are often played by coatings. The traditional single TiN coating can no longer meet the demand. How to prepare high-performance hard coatings is the research and development direction of many enterprises and research institut...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/32C23C14/02
CPCC23C14/0021C23C14/022C23C14/0641C23C14/0664C23C14/0676C23C14/32
Inventor 李灿民陶满李亚军张胜利
Owner 合肥永信信息产业股份有限公司
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