Metasurface-based uncooled infrared imaging sensor

An uncooled infrared and imaging sensor technology, used in instruments, scientific instruments, measuring devices, etc., can solve the problems of inability to achieve target band absorption, products cannot reach height, difficult to control the height of resonant cavity, etc., to improve the ability to detect targets , saving manpower and cost, the effect of low additional heat capacity

Active Publication Date: 2019-08-23
YANTAI RAYTRON TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This method greatly increases the process steps and increases the difficulty of process realization, and because the height control of different resonant cavities is very difficult, it is very easy to cause the product to fail to reach the ideal height during the preparation process, and it is also impossible to achieve the absorption of the target band , leading to an increase in the failure rate of the product

Method used

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  • Metasurface-based uncooled infrared imaging sensor
  • Metasurface-based uncooled infrared imaging sensor
  • Metasurface-based uncooled infrared imaging sensor

Examples

Experimental program
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Embodiment 1

[0070] Such as Figure 1-6 As shown, a metasurface-based uncooled infrared imaging sensor includes a double-layer uncooled infrared detector, and the double-layer uncooled infrared detector includes a semiconductor substrate 1 containing a readout circuit and a microbridge support structure The detector body, the detector body includes a first layer of suspended structure and a second layer of suspended structure, the second layer of suspended structure is arranged on the first layer of suspended structure, and the first layer of suspended structure includes a metal reflective layer 2 , an insulating medium layer 3, a metal electrode layer 6, an electrode protection layer 7, a first support layer 5, a heat-sensitive protection layer 9 and a heat-sensitive layer 8, and the second suspended structure includes a metamaterial support layer 11 and is arranged on the The metamaterial support layer 11 and the metamaterial support protection layer 12 are provided with a metamaterial s...

Embodiment 2

[0076] The difference from Implementation 1 is that, as in Figure 7 As shown, the outer contour of the metamaterial structure 13 is rectangular, the center is provided with a rectangular hollow 13-6, the outer contour is provided with a horizontal centerline and a vertical centerline, the rectangular hollow 13-6 and the A thin strip 13-5 that is bent back and forth to form a closed-loop structure is provided between the outer contours. The closed-loop structure formed by the thin strip 13-5 is symmetrical about the horizontal centerline and the vertical centerline respectively. The closed-loop structure The bending part is a right-angle bending, and the material of the thin strip is NiCr, the thickness is 20nm, and the width is 0.5 μm-5 μm.

Embodiment 3

[0078] The difference from Example 1 is that, as Figure 8-Figure 9 As shown, the metamaterial structure 13 includes a rectangular outline formed by a flat strip 13-7, and the center of each side of the rectangular outline is provided with an inward U-shaped bend 13-8, and the flat strip 13- The material of 7 is NiCr, the thickness is 20nm, and the width is 0.5μm-5μm.

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Abstract

The invention relates to a metasurface-based uncooled infrared imaging sensor, which comprises a double-layer uncooled infrared detector. The double-layer uncooled infrared detector comprises a semiconductor substrate and a detector body; the detector body comprises a first suspended structure layer and a second suspended structure layer; the first suspended structure layer comprises a metal reflective layer, an insulating dielectric layer, a metal electrode layer, an electrode protective layer, a first supporting layer, a heat sensitive protective layer and a heat sensitive layer; the secondsuspended structure layer comprises a metamaterial support layer and a metamaterial support protective layer; a metamaterial structure is arranged on the metamaterial support protective layer; and themetamaterial structure adopts NiCr or / and Al, and the thickness is between 12 to 30 nm. The preparation process is simple and is compatible with a CMOS process, and functions of multi-color detection, wide-band detection, narrow-spectrum detection and the like can be realized.

Description

[0001] This application is a divisional application with application number 201710918927.7, application date 2017.09.30, and the title of the invention "a metasurface-based uncooled infrared imaging sensor and its preparation method". technical field [0002] The invention relates to an uncooled infrared imaging sensor based on a metasurface, belonging to the field of uncooled infrared detectors. Background technique [0003] Uncooled infrared detectors (uncooled infrared bolometers) have been widely used in civilian fields, such as fire protection, automotive assistance, forest fire prevention, field detection, and environmental protection, in addition to military applications. [0004] Electromagnetic metamaterial (Metamaterial), referred to as metamaterial, refers to a class of artificial composite structures or composite materials with extraordinary electromagnetic properties that natural materials do not have; in 2001, Walser first proposed the concept of electromagnetic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J5/02G01J5/00
CPCG01J5/00G01J5/024G01J2005/0077
Inventor 王宏臣王鹏陈文礼
Owner YANTAI RAYTRON TECH
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